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ATE432458T1 - Mikrobearbeiteter gyrometrischer sensor zur differenzmessung der bewegung von vibrierenden massen - Google Patents

Mikrobearbeiteter gyrometrischer sensor zur differenzmessung der bewegung von vibrierenden massen

Info

Publication number
ATE432458T1
ATE432458T1 AT06763769T AT06763769T ATE432458T1 AT E432458 T1 ATE432458 T1 AT E432458T1 AT 06763769 T AT06763769 T AT 06763769T AT 06763769 T AT06763769 T AT 06763769T AT E432458 T1 ATE432458 T1 AT E432458T1
Authority
AT
Austria
Prior art keywords
mass
frame
movement
machined
micro
Prior art date
Application number
AT06763769T
Other languages
English (en)
Inventor
Claude Rougeot
Bernard Chaumet
Verrier Bertrand Le
Jerome Willemin
Original Assignee
Thales Sa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Thales Sa filed Critical Thales Sa
Application granted granted Critical
Publication of ATE432458T1 publication Critical patent/ATE432458T1/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Cosmetics (AREA)
AT06763769T 2005-07-05 2006-06-19 Mikrobearbeiteter gyrometrischer sensor zur differenzmessung der bewegung von vibrierenden massen ATE432458T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0507144A FR2888318B1 (fr) 2005-07-05 2005-07-05 Capteur gyrometrique micro-usine realisant une mesure differentielle du mouvement des masses vibrantes
PCT/EP2006/063306 WO2007003501A1 (fr) 2005-07-05 2006-06-19 Capteur gyrometrique micro-usine realisant une mesure differentielle du mouvement des masses vibrantes

Publications (1)

Publication Number Publication Date
ATE432458T1 true ATE432458T1 (de) 2009-06-15

Family

ID=36123100

Family Applications (1)

Application Number Title Priority Date Filing Date
AT06763769T ATE432458T1 (de) 2005-07-05 2006-06-19 Mikrobearbeiteter gyrometrischer sensor zur differenzmessung der bewegung von vibrierenden massen

Country Status (7)

Country Link
US (1) US7707886B2 (de)
EP (1) EP1899681B1 (de)
JP (1) JP2008545128A (de)
AT (1) ATE432458T1 (de)
DE (1) DE602006007001D1 (de)
FR (1) FR2888318B1 (de)
WO (1) WO2007003501A1 (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI122397B (fi) * 2008-04-16 2011-12-30 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
US20100095768A1 (en) * 2008-10-20 2010-04-22 Custom Sensors & Technologies, Inc. Micromachined torsional gyroscope with anti-phase linear sense transduction
FI20095201A0 (fi) * 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
GB201020722D0 (en) * 2010-12-07 2011-01-19 Atlantic Inertial Systems Ltd Accelerometer
EP2573516B1 (de) 2011-09-21 2013-11-20 Tronics Microsystems S.A. Eine mikroelektromechanische Gyroskop-Vorrichtung
RU2490593C1 (ru) * 2012-03-14 2013-08-20 Федеральное государственное бюджетное образовательное учреждение высшего професионального образования "Национальный исследовательский Томский политехнический университет" Интегральный микромеханический гироскоп
JP6191151B2 (ja) * 2012-05-29 2017-09-06 株式会社デンソー 物理量センサ
FR2992418B1 (fr) * 2012-06-22 2014-08-01 Thales Sa Capteur a element vibrant dans une cavite, a detection integree d anomalies
EP3019881A4 (de) * 2013-04-14 2017-04-19 Purdue Research Foundation Leistungsverbesserung von mems-vorrichtungen
FI126071B (en) * 2014-01-28 2016-06-15 Murata Manufacturing Co Improved gyroscope structure and gyroscope
CN105242782B (zh) * 2015-09-25 2019-03-29 联想(北京)有限公司 电子设备和信息处理方法
WO2017061638A1 (ko) * 2015-10-06 2017-04-13 주식회사 스탠딩에그 Mems 장치, 이를 포함하는 mems 패키지 및 사용자 단말기
US10696541B2 (en) 2016-05-26 2020-06-30 Honeywell International Inc. Systems and methods for bias suppression in a non-degenerate MEMS sensor
US10371521B2 (en) 2016-05-26 2019-08-06 Honeywell International Inc. Systems and methods for a four-mass vibrating MEMS structure
RU173867U1 (ru) * 2016-12-15 2017-09-15 федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский политехнический университет Петра Великого" (ФГАОУ ВО "СПбПУ") Вибрационный гироскоп LL-типа
US11226245B2 (en) * 2017-03-31 2022-01-18 Technische Universitaet Wien Force sensor
RU179133U1 (ru) * 2017-12-27 2018-04-28 федеральное государственное автономное образовательное учреждение высшего образования "Санкт-Петербургский политехнический университет Петра Великого" (ФГАОУ ВО "СПбПУ") Вибрационный гироскоп LL-типа
JP7225817B2 (ja) * 2019-01-17 2023-02-21 セイコーエプソン株式会社 角速度センサー、慣性計測装置、電子機器および移動体

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19530007C2 (de) * 1995-08-16 1998-11-26 Bosch Gmbh Robert Drehratensensor
JP3659160B2 (ja) * 2000-02-18 2005-06-15 株式会社デンソー 角速度センサ
JP3603746B2 (ja) * 2000-05-02 2004-12-22 株式会社村田製作所 振動子
DE10108196A1 (de) * 2001-02-21 2002-10-24 Bosch Gmbh Robert Drehratensensor
DE10108197A1 (de) * 2001-02-21 2002-09-12 Bosch Gmbh Robert Drehratensensor
JP2002323323A (ja) * 2001-04-25 2002-11-08 Mitsubishi Electric Corp 角速度センサ
JP2003247829A (ja) * 2002-02-21 2003-09-05 Kinseki Ltd 角速度センサ
FR2846740B1 (fr) * 2002-11-05 2005-02-04 Thales Sa Capteur gyrometrique micro-usine, a detection dans le plan de la plaque usinee
FR2859527B1 (fr) * 2003-09-09 2005-11-18 Thales Sa Gyrometre micro-usine a double diapason et a detection dans le plan de la plaque usinee
FR2859528B1 (fr) * 2003-09-09 2006-01-06 Thales Sa Gyrometre micro-usine a double diapason et a detection dans le plan de la plaque usinee
US7036372B2 (en) * 2003-09-25 2006-05-02 Kionix, Inc. Z-axis angular rate sensor
JP4433747B2 (ja) * 2003-09-29 2010-03-17 株式会社村田製作所 角速度検出装置

Also Published As

Publication number Publication date
US7707886B2 (en) 2010-05-04
EP1899681B1 (de) 2009-05-27
FR2888318A1 (fr) 2007-01-12
JP2008545128A (ja) 2008-12-11
DE602006007001D1 (de) 2009-07-09
US20080210005A1 (en) 2008-09-04
WO2007003501A1 (fr) 2007-01-11
FR2888318B1 (fr) 2007-09-14
EP1899681A1 (de) 2008-03-19

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