ATE211820T1 - Verfahren zum erkennen und beurteilen von fehlern in semi-reflektierender oberflächenschicht - Google Patents
Verfahren zum erkennen und beurteilen von fehlern in semi-reflektierender oberflächenschichtInfo
- Publication number
- ATE211820T1 ATE211820T1 AT95401909T AT95401909T ATE211820T1 AT E211820 T1 ATE211820 T1 AT E211820T1 AT 95401909 T AT95401909 T AT 95401909T AT 95401909 T AT95401909 T AT 95401909T AT E211820 T1 ATE211820 T1 AT E211820T1
- Authority
- AT
- Austria
- Prior art keywords
- colour
- semi
- detecting
- surface layer
- reflective surface
- Prior art date
Links
- 239000002344 surface layer Substances 0.000 title 1
- 239000011521 glass Substances 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N7/00—Television systems
- H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/46—Measurement of colour; Colour measuring devices, e.g. colorimeters
- G01J3/50—Measurement of colour; Colour measuring devices, e.g. colorimeters using electric radiation detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N2021/1765—Method using an image detector and processing of image signal
- G01N2021/177—Detector of the video camera type
- G01N2021/1776—Colour camera
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/8422—Investigating thin films, e.g. matrix isolation method
- G01N2021/8427—Coatings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Immunology (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Textile Engineering (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Spectrometry And Color Measurement (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19509345A DE19509345A1 (de) | 1995-03-15 | 1995-03-15 | Verfahren zum Erkennen und Bewerten von Fehlern in teilreflektierenden Oberflächenschichten |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE211820T1 true ATE211820T1 (de) | 2002-01-15 |
Family
ID=7756720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT95401909T ATE211820T1 (de) | 1995-03-15 | 1995-08-18 | Verfahren zum erkennen und beurteilen von fehlern in semi-reflektierender oberflächenschicht |
Country Status (10)
Country | Link |
---|---|
US (1) | US5887077A (de) |
EP (1) | EP0732579B1 (de) |
JP (1) | JPH08292156A (de) |
KR (1) | KR100399507B1 (de) |
CN (1) | CN1099032C (de) |
AT (1) | ATE211820T1 (de) |
DE (2) | DE19509345A1 (de) |
DK (1) | DK0732579T3 (de) |
ES (1) | ES2170128T3 (de) |
PT (1) | PT732579E (de) |
Families Citing this family (41)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4527205B2 (ja) * | 1997-03-31 | 2010-08-18 | リアル・タイム・メトロジー,インコーポレーテッド | 光学検査モジュール、及び統合プロセス工具内で基板上の粒子及び欠陥を検出するための方法 |
DE19813072A1 (de) * | 1998-03-25 | 1999-09-30 | Laser Sorter Gmbh | Verfahren und Vorrichtung zur Bestimmung der optischen Qualität und zur Detektion von Fehlern von Flachglas und anderen optisch transparenten Materialien |
DE19948190B4 (de) * | 1999-10-06 | 2013-05-16 | GPP Chemnitz Gesellschaft für Prozeßrechnerprogrammierung mbH | Anordnung zur Charakterisierung von Unregelmässigkeiten auf ebenen und transparenten Oberflächen von Gegenständen, bspw. von einer Kittschicht |
EP1126273A1 (de) * | 2000-02-09 | 2001-08-22 | Orbis Oy | Verfahren und Vorrichtung zur Detektion von Fehlern in einem durchsichtigen Gegenstand |
AU2001288641A1 (en) * | 2000-09-01 | 2002-03-13 | Mark M. Abbott | Optical system for imaging distortions in moving reflective sheets |
US7082218B2 (en) * | 2001-07-27 | 2006-07-25 | Hewlett-Packard Development Company, L.P. | Color correction of images |
GB2408888B (en) * | 2001-07-27 | 2006-02-22 | Hewlett Packard Co | Electronic image colour plane reconstruction |
EP1357515A1 (de) * | 2002-04-22 | 2003-10-29 | Agfa-Gevaert AG | Verfahren zur Verarbeitung digitaler Bilddaten von fotografischen Bildern |
US6995847B2 (en) | 2002-05-24 | 2006-02-07 | Honeywell International Inc. | Methods and systems for substrate surface evaluation |
US7463765B2 (en) * | 2003-02-25 | 2008-12-09 | Lamda-Lite Enterprises Incorporated | System and method for detecting and reporting fabrication defects using a multi-variant image analysis |
DE10326217A1 (de) * | 2003-06-11 | 2004-12-30 | Bayerische Motoren Werke Ag | Verfahren zum Erkennen von Fehlern der Haftung einer Beschichtung |
DE10326216B4 (de) * | 2003-06-11 | 2007-03-15 | Bayerische Motoren Werke Ag | Verfahren zum Erkennen von Fehlern der Haftung einer Beschichtung auf einem Substrat |
US20060026807A1 (en) * | 2003-08-07 | 2006-02-09 | Carnevali Jeffrey D | Quick release mounting apparatus |
DE102005007715B4 (de) * | 2005-02-18 | 2008-07-24 | Schott Ag | Vorrichtung zur Erfassung von Fehlstellen und Verwendung der Vorrichtung |
KR101338576B1 (ko) * | 2005-12-26 | 2013-12-06 | 가부시키가이샤 니콘 | 화상 해석에 의해서 결함 검사를 실시하는 결함검사장치 |
US7369240B1 (en) | 2006-07-20 | 2008-05-06 | Litesentry Corporation | Apparatus and methods for real-time adaptive inspection for glass production |
US7551274B1 (en) | 2007-02-28 | 2009-06-23 | Lite Sentry Corporation | Defect detection lighting system and methods for large glass sheets |
DE102007058180B3 (de) * | 2007-12-04 | 2008-08-21 | Höge, Günther | Vorrichtung zur Aufbringung eines Fluids auf einen Körperteil |
KR100953204B1 (ko) * | 2008-05-19 | 2010-04-15 | (주)쎄미시스코 | 기판의 품질 검사장치 및 그 검사방법 |
TWI412736B (zh) * | 2009-12-04 | 2013-10-21 | Delta Electronics Inc | 基板內部缺陷檢查裝置及方法 |
US8270701B2 (en) * | 2010-01-08 | 2012-09-18 | 3M Innovative Properties Company | Optical web-based defect detection using intrasensor uniformity correction |
WO2012007782A1 (en) * | 2010-07-15 | 2012-01-19 | Ppg Iberica, S.A. | Device for the micro-inspection of flat surfaces and method of use |
CN103175851B (zh) * | 2011-12-21 | 2015-01-07 | 北京兆维电子(集团)有限责任公司 | 用于多相机扫描系统的标定工具及标定方法 |
GB201122082D0 (en) * | 2011-12-22 | 2012-02-01 | Rolls Royce Deutschland | Method and apparatus for inspection of components |
JP5944719B2 (ja) * | 2012-04-04 | 2016-07-05 | 大塚電子株式会社 | 配光特性測定装置および配光特性測定方法 |
CN103076343B (zh) * | 2012-12-27 | 2016-09-14 | 深圳市华星光电技术有限公司 | 素玻璃激光检查机及素玻璃检查方法 |
US9140655B2 (en) | 2012-12-27 | 2015-09-22 | Shenzhen China Star Optoelectronics Technology Co., Ltd. | Mother glass inspection device and mother glass inspection method |
FR3001043B1 (fr) * | 2013-01-11 | 2016-05-06 | Commissariat Energie Atomique | Procede de surveillance de la degradation d'un miroir |
DE102013216566A1 (de) * | 2013-08-21 | 2015-02-26 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Vorrichtung und verfahren zur erfassung einer zumindest teilweise spiegelnden oberfläche |
CN103528546A (zh) * | 2013-09-23 | 2014-01-22 | 芜湖长信科技股份有限公司 | 一种检测浮法玻璃波纹度的装置和方法 |
DE102014100594A1 (de) * | 2014-01-20 | 2015-07-23 | Isra Surface Vision Gmbh | Vorrichtung zur Inspektion eines mit einer beschichteten Oberfläche versehenen Materials und entsprechendes Verfahren |
US9933373B2 (en) * | 2014-04-29 | 2018-04-03 | Glasstech, Inc. | Glass sheet acquisition and positioning mechanism for an inline system for measuring the optical characteristics of a glass sheet |
CN104316543B (zh) * | 2014-10-10 | 2016-10-05 | 南京大树智能科技股份有限公司 | 一种烟包玻璃纸检测方法 |
JP6314798B2 (ja) * | 2014-11-12 | 2018-04-25 | Jfeスチール株式会社 | 表面欠陥検出方法及び表面欠陥検出装置 |
JP6697285B2 (ja) * | 2015-02-25 | 2020-05-20 | 株式会社昭和電気研究所 | ウェハ欠陥検査装置 |
US10851013B2 (en) | 2015-03-05 | 2020-12-01 | Glasstech, Inc. | Glass sheet acquisition and positioning system and associated method for an inline system for measuring the optical characteristics of a glass sheet |
CN105021530A (zh) * | 2015-06-26 | 2015-11-04 | 淮南市巨惠工贸有限公司 | 一种监测铝塑板生产时漏涂色差的装置 |
CN111812063B (zh) * | 2020-07-16 | 2022-11-04 | 中国计量大学 | 一种金属漆表面闪光效果的评价方法及测量装置 |
CN112683912B (zh) * | 2020-11-27 | 2024-06-18 | 成都数之联科技股份有限公司 | 一种布面缺陷视觉检测方法及其装置 |
CN115435666B (zh) * | 2022-07-13 | 2024-06-11 | 沪东中华造船(集团)有限公司 | 一种船舶涂层区域破损面积估算辅助装置及估算方法 |
CN116818798A (zh) * | 2023-05-31 | 2023-09-29 | 成都瑞波科材料科技有限公司 | 用于涂布工艺的彩虹纹检测装置、方法及涂布工艺设备 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2182254A5 (de) * | 1972-04-24 | 1973-12-07 | Saint Gobain Pont A Mousson | |
US4812904A (en) * | 1986-08-11 | 1989-03-14 | Megatronics, Incorporated | Optical color analysis process |
US5073952A (en) * | 1988-09-07 | 1991-12-17 | Sigmax Kabushiki Kaisha | Pattern recognition device |
JP2573434B2 (ja) * | 1991-05-31 | 1997-01-22 | 松下電工株式会社 | 特定色抽出方法 |
US5225890A (en) * | 1991-10-28 | 1993-07-06 | Gencorp Inc. | Surface inspection apparatus and method |
JP2756386B2 (ja) * | 1991-12-27 | 1998-05-25 | 日本たばこ産業株式会社 | 円筒形物体の外観検査装置 |
JPH05332838A (ja) * | 1992-05-26 | 1993-12-17 | Imaizumi Shokai:Kk | 色ムラ外観検査装置 |
US5335293A (en) * | 1992-06-16 | 1994-08-02 | Key Technology, Inc. | Product inspection method and apparatus |
GB9219450D0 (en) * | 1992-09-15 | 1992-10-28 | Glaverbel | Thin film thickness monitoring and control |
GB2272615A (en) * | 1992-11-17 | 1994-05-18 | Rudolf Bisping | Controlling signal-to-noise ratio in noisy recordings |
DE4309802A1 (de) * | 1993-03-28 | 1994-09-29 | Robert Prof Dr Ing Massen | Produktionsnahe Farbkontrolle mit bildgebenden Sensoren |
-
1995
- 1995-03-15 DE DE19509345A patent/DE19509345A1/de not_active Withdrawn
- 1995-08-18 AT AT95401909T patent/ATE211820T1/de active
- 1995-08-18 DE DE69524939T patent/DE69524939T2/de not_active Expired - Lifetime
- 1995-08-18 ES ES95401909T patent/ES2170128T3/es not_active Expired - Lifetime
- 1995-08-18 EP EP95401909A patent/EP0732579B1/de not_active Expired - Lifetime
- 1995-08-18 DK DK95401909T patent/DK0732579T3/da active
- 1995-08-18 PT PT95401909T patent/PT732579E/pt unknown
-
1996
- 1996-03-13 US US08/614,606 patent/US5887077A/en not_active Expired - Lifetime
- 1996-03-14 KR KR1019960007473A patent/KR100399507B1/ko not_active IP Right Cessation
- 1996-03-14 CN CN96107312A patent/CN1099032C/zh not_active Expired - Lifetime
- 1996-03-15 JP JP8059225A patent/JPH08292156A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
JPH08292156A (ja) | 1996-11-05 |
DK0732579T3 (da) | 2002-04-29 |
EP0732579A2 (de) | 1996-09-18 |
DE19509345A1 (de) | 1996-09-19 |
CN1099032C (zh) | 2003-01-15 |
EP0732579B1 (de) | 2002-01-09 |
CN1147634A (zh) | 1997-04-16 |
US5887077A (en) | 1999-03-23 |
EP0732579A3 (de) | 1998-01-07 |
KR960036673A (ko) | 1996-10-28 |
DE69524939T2 (de) | 2002-09-05 |
DE69524939D1 (de) | 2002-02-14 |
KR100399507B1 (ko) | 2003-12-24 |
ES2170128T3 (es) | 2002-08-01 |
PT732579E (pt) | 2002-06-28 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
UEP | Publication of translation of european patent specification |