ATE273407T1 - Steuerung der schmelzenhöhe zur züchtung halbleitermaterialen aus einer schmelze - Google Patents
Steuerung der schmelzenhöhe zur züchtung halbleitermaterialen aus einer schmelzeInfo
- Publication number
- ATE273407T1 ATE273407T1 AT00928608T AT00928608T ATE273407T1 AT E273407 T1 ATE273407 T1 AT E273407T1 AT 00928608 T AT00928608 T AT 00928608T AT 00928608 T AT00928608 T AT 00928608T AT E273407 T1 ATE273407 T1 AT E273407T1
- Authority
- AT
- Austria
- Prior art keywords
- melt
- control
- semiconductor materials
- height
- growing semiconductor
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/007—Pulling on a substrate
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
- Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1036—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die]
- Y10T117/1044—Seed pulling including solid member shaping means other than seed or product [e.g., EDFG die] including means forming a flat shape [e.g., ribbon]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1056—Seed pulling including details of precursor replenishment
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Photovoltaic Devices (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/304,499 US6200383B1 (en) | 1999-05-03 | 1999-05-03 | Melt depth control for semiconductor materials grown from a melt |
PCT/US2000/011638 WO2000066817A1 (en) | 1999-05-03 | 2000-05-01 | Melt depth control for semiconductor materials grown from a melt |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE273407T1 true ATE273407T1 (de) | 2004-08-15 |
Family
ID=23176787
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT00928608T ATE273407T1 (de) | 1999-05-03 | 2000-05-01 | Steuerung der schmelzenhöhe zur züchtung halbleitermaterialen aus einer schmelze |
Country Status (7)
Country | Link |
---|---|
US (1) | US6200383B1 (de) |
EP (1) | EP1185726B1 (de) |
JP (1) | JP4557436B2 (de) |
AT (1) | ATE273407T1 (de) |
DE (1) | DE60012923T2 (de) |
ES (1) | ES2221845T3 (de) |
WO (1) | WO2000066817A1 (de) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ATE527683T1 (de) * | 2001-08-10 | 2011-10-15 | Evergreen Solar Inc | Verfahren zur dotierung von halbleitern |
EP1427873A1 (de) * | 2001-09-19 | 2004-06-16 | Evergreen Solar Inc. | Verfahren mit hohe ausbeute zur herstellung von siliciumnanokristallen mit chemisch-zugänglichen oberflächen |
US7267721B2 (en) * | 2001-09-19 | 2007-09-11 | Evergreen Solar, Inc. | Method for preparing group IV nanocrystals with chemically accessible surfaces |
WO2004035877A2 (en) * | 2002-10-18 | 2004-04-29 | Evergreen Solar, Inc. | Method and apparatus for crystal growth |
US6814802B2 (en) * | 2002-10-30 | 2004-11-09 | Evergreen Solar, Inc. | Method and apparatus for growing multiple crystalline ribbons from a single crucible |
US7572334B2 (en) * | 2006-01-03 | 2009-08-11 | Applied Materials, Inc. | Apparatus for fabricating large-surface area polycrystalline silicon sheets for solar cell application |
CN101522959B (zh) * | 2006-10-27 | 2013-10-23 | 长青太阳能股份有限公司 | 用于形成硅晶片的方法和设备 |
WO2008060874A1 (en) * | 2006-11-10 | 2008-05-22 | Evergreen Solar, Inc. | Substrate with two sided doping and method of producing the same |
US20080134964A1 (en) * | 2006-12-06 | 2008-06-12 | Evergreen Solar, Inc. | System and Method of Forming a Crystal |
US7780782B2 (en) * | 2007-06-08 | 2010-08-24 | Evergreen Solar, Inc. | Method and apparatus for growing a ribbon crystal with localized cooling |
US20110303290A1 (en) * | 2010-06-14 | 2011-12-15 | Korea Institute Of Energy Research | Method and apparatus for manufacturing silicon substrate with excellent surface quality using inert gas blowing |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3980438A (en) | 1975-08-28 | 1976-09-14 | Arthur D. Little, Inc. | Apparatus for forming semiconductor crystals of essentially uniform diameter |
US4036595A (en) | 1975-11-06 | 1977-07-19 | Siltec Corporation | Continuous crystal growing furnace |
JPS5373481A (en) | 1976-12-13 | 1978-06-29 | Nippon Telegr & Teleph Corp <Ntt> | Continuous preparation apparatus for sheet crystal |
US4661200A (en) | 1980-01-07 | 1987-04-28 | Sachs Emanuel M | String stabilized ribbon growth |
US4689109A (en) | 1980-12-11 | 1987-08-25 | Sachs Emanuel M | String stabilized ribbon growth a method for seeding same |
US4627887A (en) | 1980-12-11 | 1986-12-09 | Sachs Emanuel M | Melt dumping in string stabilized ribbon growth |
US4594229A (en) | 1981-02-25 | 1986-06-10 | Emanuel M. Sachs | Apparatus for melt growth of crystalline semiconductor sheets |
US4469552A (en) | 1982-04-23 | 1984-09-04 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Process and apparatus for growing a crystal ribbon |
JPS5933554B2 (ja) | 1982-08-19 | 1984-08-16 | 株式会社東芝 | 結晶成長装置 |
JPS59182293A (ja) | 1983-03-31 | 1984-10-17 | Shinenerugii Sogo Kaihatsu Kiko | シリコンリボン結晶連続成長方法 |
FR2556109B2 (fr) | 1983-08-29 | 1986-09-12 | Comp Generale Electricite | Dispositif pour deposer en regime continu une couche de silicium polycristallin sur un ruban de carbone |
US4626847A (en) * | 1983-12-27 | 1986-12-02 | Zenith Electronics Corporation | Remote control transmitter system |
CA1261715A (en) | 1984-07-06 | 1989-09-26 | General Signal Corporation | Apparatus and process for growing monocrystals of semiconductor materials from shallow crucibles by czochralski technique |
US4936947A (en) | 1987-05-05 | 1990-06-26 | Mobil Solar Energy Corporation | System for controlling apparatus for growing tubular crystalline bodies |
JPH0696478B2 (ja) * | 1989-01-26 | 1994-11-30 | 科学技術庁無機材質研究所長 | 単結晶自動育成法 |
US5098229A (en) | 1989-10-18 | 1992-03-24 | Mobil Solar Energy Corporation | Source material delivery system |
US5242667A (en) | 1991-07-26 | 1993-09-07 | Ferrofluidics Corporation | Solid pellet feeder for controlled melt replenishment in continuous crystal growing process |
DE4428743A1 (de) * | 1994-08-13 | 1996-02-22 | Georg Prof Dr Mueller | Verfahren und Vorrichtung zur Messung und Steuerung bzw. Regelung der Sauerstoffkonzentration in Siliciumschmelzen |
JPH1112079A (ja) * | 1997-06-19 | 1999-01-19 | Komatsu Electron Metals Co Ltd | 結晶体の引上げ方法およびその引上げ装置 |
-
1999
- 1999-05-03 US US09/304,499 patent/US6200383B1/en not_active Expired - Lifetime
-
2000
- 2000-05-01 JP JP2000615436A patent/JP4557436B2/ja not_active Expired - Fee Related
- 2000-05-01 AT AT00928608T patent/ATE273407T1/de not_active IP Right Cessation
- 2000-05-01 ES ES00928608T patent/ES2221845T3/es not_active Expired - Lifetime
- 2000-05-01 DE DE60012923T patent/DE60012923T2/de not_active Expired - Lifetime
- 2000-05-01 EP EP00928608A patent/EP1185726B1/de not_active Expired - Lifetime
- 2000-05-01 WO PCT/US2000/011638 patent/WO2000066817A1/en active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP2002543038A (ja) | 2002-12-17 |
WO2000066817A1 (en) | 2000-11-09 |
JP4557436B2 (ja) | 2010-10-06 |
ES2221845T3 (es) | 2005-01-16 |
DE60012923D1 (de) | 2004-09-16 |
DE60012923T2 (de) | 2005-08-25 |
EP1185726A1 (de) | 2002-03-13 |
US6200383B1 (en) | 2001-03-13 |
EP1185726B1 (de) | 2004-08-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
RER | Ceased as to paragraph 5 lit. 3 law introducing patent treaties |