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AT352406B - Verfahren zur herstellung von reliefstrukturen - Google Patents

Verfahren zur herstellung von reliefstrukturen

Info

Publication number
AT352406B
AT352406B AT450675A AT450675A AT352406B AT 352406 B AT352406 B AT 352406B AT 450675 A AT450675 A AT 450675A AT 450675 A AT450675 A AT 450675A AT 352406 B AT352406 B AT 352406B
Authority
AT
Austria
Prior art keywords
production
relief structures
relief
structures
Prior art date
Application number
AT450675A
Other languages
English (en)
Other versions
ATA450675A (de
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19742437422 external-priority patent/DE2437422C3/de
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of ATA450675A publication Critical patent/ATA450675A/de
Application granted granted Critical
Publication of AT352406B publication Critical patent/AT352406B/de

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
  • Polyurethanes Or Polyureas (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
AT450675A 1974-08-02 1975-06-12 Verfahren zur herstellung von reliefstrukturen AT352406B (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742437422 DE2437422C3 (de) 1974-08-02 Verfahren zur Herstellung von Reliefstrukturen

Publications (2)

Publication Number Publication Date
ATA450675A ATA450675A (de) 1979-02-15
AT352406B true AT352406B (de) 1979-09-25

Family

ID=5922340

Family Applications (1)

Application Number Title Priority Date Filing Date
AT450675A AT352406B (de) 1974-08-02 1975-06-12 Verfahren zur herstellung von reliefstrukturen

Country Status (8)

Country Link
US (1) US4088489A (de)
JP (1) JPS5541421B2 (de)
AT (1) AT352406B (de)
BE (1) BE831682R (de)
FR (1) FR2288995A2 (de)
GB (1) GB1512972A (de)
IT (1) IT1049570B (de)
NL (1) NL180145C (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE9931T1 (de) * 1979-05-18 1984-11-15 Ciba-Geigy Ag Lichtvernetzbare copolymere, sie enthaltendes lichtempfindliches aufzeichnungsmaterial, seine verwendung zur herstellung photographischer abbildungen und verfahren zur herstellung von photographischen abbildungen.
DE2933856A1 (de) * 1979-08-21 1981-03-12 Siemens AG, 1000 Berlin und 8000 München Verfahren zur herstellung eines zugfesten lichtwellenleiters
DE3233912A1 (de) * 1982-09-13 1984-03-15 Merck Patent Gmbh, 6100 Darmstadt Fotolacke zur ausbildung von reliefstrukturen aus hochwaermebestaendigen polymeren
US4663268A (en) * 1984-12-28 1987-05-05 Eastman Kodak Company High-temperature resistant photoresists featuring maleimide binders
DE3717933A1 (de) * 1987-05-27 1988-12-08 Hoechst Ag Photopolymerisierbares gemisch, dieses enthaltendes aufzeichnungsmaterial und verfahren zur herstellung von hochwaermebestaendigen reliefstrukturen
DE4217688A1 (de) * 1992-05-29 1993-12-02 Basf Lacke & Farben Durch Einwirkung von Strahlung vernetzendes Gemisch und dessen Verwendung zur Herstellung hochtemperaturbeständiger Reliefstrukturen
US6006667A (en) * 1998-03-12 1999-12-28 Presstek, Inc. Method of lithographic imaging with reduced debris-generated performance degradation and related constructions

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3475176A (en) * 1966-09-06 1969-10-28 Eastman Kodak Co Azide sensitized photosensitive prepolymer compositions
US3650746A (en) * 1969-06-16 1972-03-21 Grace W R & Co Dual image formation on separate supports of photocurable composition
US3858510A (en) * 1971-03-11 1975-01-07 Asahi Chemical Ind Relief structures prepared from photosensitive compositions
US3801638A (en) * 1971-03-12 1974-04-02 Gaf Corp Triacrylyldiethylenetriamine,method of producing the same,and photopolymerization process and system utilizing the same
BE793732A (fr) * 1972-01-10 1973-05-02 Grace W R & Co Composition contenant un polyene et un polythiol
NL177718C (nl) * 1973-02-22 1985-11-01 Siemens Ag Werkwijze ter vervaardiging van reliefstructuren uit warmte-bestendige polymeren.
US3847767A (en) * 1973-03-13 1974-11-12 Grace W R & Co Method of producing a screen printable photocurable solder resist

Also Published As

Publication number Publication date
NL7509203A (nl) 1976-02-04
NL180145B (nl) 1986-08-01
DE2437422B2 (de) 1976-08-26
FR2288995B2 (de) 1978-11-03
JPS5541421B2 (de) 1980-10-24
US4088489A (en) 1978-05-09
IT1049570B (it) 1981-02-10
BE831682R (fr) 1975-11-17
NL180145C (nl) 1987-01-02
ATA450675A (de) 1979-02-15
FR2288995A2 (fr) 1976-05-21
JPS5140921A (de) 1976-04-06
DE2437422A1 (de) 1976-02-19
GB1512972A (en) 1978-06-01

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Legal Events

Date Code Title Description
ELA Expired due to lapse of time