NL7811418A - Snelle elektronenoptische lens. - Google Patents

Snelle elektronenoptische lens.

Info

Publication number: NL7811418A
Authority: NL; Netherlands
Prior art keywords: electronoptic; lens; fast; fast electronoptic; electronoptic lens
Prior art date: 1977-11-25

Application number

NL7811418A

Other languages

English (en)

Other versions

NL182996B (nl

NL182996C (nl

Original Assignee

Hell Rudolf Dr Ing Gmbh

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1977-11-25

Filing date

1978-11-20

Publication date

1979-05-29

1978-11-20 Application filed by Hell Rudolf Dr Ing Gmbh filed Critical Hell Rudolf Dr Ing Gmbh

1979-05-29 Publication of NL7811418A publication Critical patent/NL7811418A/nl

1988-01-18 Publication of NL182996B publication Critical patent/NL182996B/nl

1988-06-16 Application granted granted Critical

1988-06-16 Publication of NL182996C publication Critical patent/NL182996C/nl

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/14—Lenses magnetic
- H01J37/141—Electromagnetic lenses
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
- H01J3/14—Arrangements for focusing or reflecting ray or beam
- H01J3/20—Magnetic lenses
- H01J3/22—Magnetic lenses using electromagnetic means only
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus

Landscapes

Physics & Mathematics (AREA)
Electromagnetism (AREA)
Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Beam Exposure (AREA)

NLAANVRAGE7811418,A 1977-11-25 1978-11-20 Snelle elektronenoptische, elektromagnetische lenzeninrichting. NL182996C (nl)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
DE2752598A DE2752598C3 (de)	1977-11-25	1977-11-25	Verfahren zum Betrieb einer elektromagnetischen fokussierenden elektronen-optischen Linsenanordnung und Linsenanordnung hierfür

Publications (3)

Publication Number	Publication Date
NL7811418A true NL7811418A (nl)	1979-05-29
NL182996B NL182996B (nl)	1988-01-18
NL182996C NL182996C (nl)	1988-06-16

Family

ID=6024590

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
NLAANVRAGE7811418,A NL182996C (nl)	1977-11-25	1978-11-20	Snelle elektronenoptische, elektromagnetische lenzeninrichting.

Country Status (9)

Country	Link
US (1)	US4245159A (nl)
JP (1)	JPS5476058A (nl)
BE (1)	BE871109A (nl)
CA (1)	CA1100564A (nl)
CH (1)	CH635464A5 (nl)
DE (1)	DE2752598C3 (nl)
FR (1)	FR2410356A1 (nl)
GB (1)	GB2012476B (nl)
NL (1)	NL182996C (nl)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5512576U (nl) *	1978-07-12	1980-01-26
DE2947444C2 (de) *	1979-11-24	1983-12-08	Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel	Elektronenstrahl-Gravierverfahren
DE3037230C2 (de) *	1980-10-02	1988-06-16	Institut für Kerntechnik und Energiewandlung e.V., 7000 Stuttgart	Elektronenoptik für eine Elektronenstrahlschweißmaschine
JPS5780646A (en) *	1980-11-06	1982-05-20	Jeol Ltd	Electron lens
WO1982001787A1 (en) *	1980-11-22	1982-05-27	Grieger Dieter	Method for engraving by means of an electron beam
EP0076868B1 (de) *	1981-10-10	1987-01-14	DR.-ING. RUDOLF HELL GmbH	Elektronenstrahl-Gravierverfahren und Einrichtung zu seiner Durchführung
US4395691A (en) *	1982-03-04	1983-07-26	Hughes Aircraft Company	Beam deflection system
EP0255542A1 (en) *	1986-02-03	1988-02-10	CREWE, Albert V.	Electron beam memory system with ultra-compact, high current density electron gun
US4764818A (en) *	1986-02-03	1988-08-16	Electron Beam Memories	Electron beam memory system with improved high rate digital beam pulsing system
NL8601511A (nl) *	1986-06-11	1988-01-04	Philips Nv	Kathodestraalbuis met magnetische focusseerlens.
NL8601512A (nl) *	1986-06-11	1988-01-04	Philips Nv	Kathodestraalbuis met magnetische focusseerlens.
US4760567A (en) *	1986-08-11	1988-07-26	Electron Beam Memories	Electron beam memory system with ultra-compact, high current density electron gun
JPS6369463U (nl) *	1986-10-24	1988-05-10
FR2644930B1 (fr) *	1989-03-21	1996-04-26	Cameca	Lentille electromagnetique composite a focale variable
FR2683386B1 (fr) *	1991-11-05	1993-12-31	Thomson Tubes Displays Sa	Dispositif de focalisation magnetique pour tube a rayons cathodiques.
US5489826A (en) *	1994-08-08	1996-02-06	Thomson Consumer Electronics, Inc.	Focus coil current generator for a cathode ray tube
JPH08138602A (ja) *	1994-11-08	1996-05-31	Hitachi Ltd	電子線装置
US6180947B1 (en) *	1998-08-07	2001-01-30	Nikon Corporation	Multi-element deflection aberration correction for electron beam lithography
US6201251B1 (en)	1998-08-28	2001-03-13	Nikon Corporation	Compensation of space charge in a particle beam system

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB515947A (en) *	1938-06-14	1939-12-19	Baird Television Ltd	Improvements in or relating to cathode ray tube arrangements
US2664521A (en) *	1951-11-07	1953-12-29	Motorola Inc	Deflection circuits
NL96667C (nl) *	1957-01-03
NL268860A (nl) *	1959-04-17
NL285301A (nl) *	1961-11-15
NL145716B (nl) *	1964-06-06	1975-04-15	Philips Nv	Elektronenstraalapparaat.
JPS5136196B2 (nl) *	1972-05-22	1976-10-07
DE2458370C2 (de) *	1974-12-10	1984-05-10	Dr.-Ing. Rudolf Hell Gmbh, 2300 Kiel	Energiestrahl-Gravierverfahren und Einrichtung zu seiner Durchführung
DE2627176B2 (de) *	1976-06-15	1978-09-14	Siemens Ag, 1000 Berlin Und 8000 Muenchen	Elektronenstrahloptisches Projektionsgerät mit einer langbrennweitigen magnetischen Linse

1977
- 1977-11-25 DE DE2752598A patent/DE2752598C3/de not_active Expired
1978
- 1978-10-02 FR FR7828136A patent/FR2410356A1/fr active Granted
- 1978-10-09 CH CH1044878A patent/CH635464A5/de not_active IP Right Cessation
- 1978-10-09 BE BE78190995A patent/BE871109A/xx not_active IP Right Cessation
- 1978-11-10 JP JP13797478A patent/JPS5476058A/ja active Granted
- 1978-11-16 CA CA316,378A patent/CA1100564A/en not_active Expired
- 1978-11-20 NL NLAANVRAGE7811418,A patent/NL182996C/nl not_active IP Right Cessation
- 1978-11-21 US US05/962,656 patent/US4245159A/en not_active Expired - Lifetime
- 1978-11-21 GB GB7845421A patent/GB2012476B/en not_active Expired

Also Published As

Publication number	Publication date
FR2410356A1 (fr)	1979-06-22
NL182996B (nl)	1988-01-18
DE2752598C3 (de)	1981-10-15
JPS5476058A (en)	1979-06-18
GB2012476A (en)	1979-07-25
CA1100564A (en)	1981-05-05
CH635464A5 (de)	1983-03-31
DE2752598B2 (de)	1981-01-29
FR2410356B1 (nl)	1984-03-30
BE871109A (fr)	1979-02-01
US4245159A (en)	1981-01-13
NL182996C (nl)	1988-06-16
GB2012476B (en)	1982-05-19
DE2752598A1 (de)	1979-05-31
JPS6124782B2 (nl)	1986-06-12

Publication	Publication Date	Title
BE865203A (fr)	1978-09-22	Hogedruk-kwikdampontladingslamp.
NL184053C (nl)	1989-04-03	Contactlens.
NL7805121A (nl)	1978-11-15	Gesubstitueerde fenylaminocarbonylbenzamiden.
NL7810782A (nl)	1979-05-02	Vliegtuig.
NL7811418A (nl)	1979-05-29	Snelle elektronenoptische lens.
NL7804145A (nl)	1978-10-20	Gesubstitueerde octanen.
NO783675L (no)	1979-05-04	Kontaktlinse.
NL7801474A (nl)	1978-08-14	Lensstelsel.
NL7808370A (nl)	1979-03-02	Lensstelsel.
AT348273B (de)	1979-02-12	Pankratisches objektiv
NL7808253A (nl)	1979-02-12	4-hydroxy-4-methyl-2-cyclohexeen-1-on.
AT348274B (de)	1979-02-12	Pankratisches objektiv
DD131525A1 (de)	1978-07-05	Endoskopobjektiv
NL7713096A (nl)	1978-08-21	Gesubstitueerde alaninen.
AT348790B (de)	1979-03-12	Pankratisches objektiv
ES229634Y (es)	1978-01-01	Lupa pisa-papeles.
ATA95277A (de)	1978-02-15	Objektiv
ES233033Y (es)	1978-07-01	Muneco simplificado.
ES230349Y (es)	1978-02-16	Expositor-dispensador simplificado.
ES225658Y (es)	1977-07-01	Molino-hucha.
ES230594Y (es)	1978-07-16	Grifo-mezclador.
ES226275Y (es)	1977-11-16	Fleco despedregador.
ES232676Y (es)	1978-06-16	Molde-criba.
ES232650Y (es)	1979-02-16	Jacena.
ES232507Y (es)	1978-08-01	Burlete.

Legal Events

Date	Code	Title	Description
1983-05-02	BA	A request for search or an international-type search has been filed
1983-06-01	BB	A search report has been drawn up
1983-08-01	BC	A request for examination has been filed
1985-01-01	A85	Still pending on 85-01-01
1999-02-01	V4	Discontinued because of reaching the maximum lifetime of a patent	Free format text: 981120