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NL144201B - METHOD OF COVERING THE SURFACE OF A SUBSTRATE. - Google Patents

METHOD OF COVERING THE SURFACE OF A SUBSTRATE.

Info

Publication number
NL144201B
NL144201B NL656505685A NL6505685A NL144201B NL 144201 B NL144201 B NL 144201B NL 656505685 A NL656505685 A NL 656505685A NL 6505685 A NL6505685 A NL 6505685A NL 144201 B NL144201 B NL 144201B
Authority
NL
Netherlands
Prior art keywords
covering
substrate
Prior art date
Application number
NL656505685A
Other languages
Dutch (nl)
Other versions
NL6505685A (en
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Publication of NL6505685A publication Critical patent/NL6505685A/xx
Publication of NL144201B publication Critical patent/NL144201B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/60—Deposition of organic layers from vapour phase
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
    • C08G61/025—Polyxylylenes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/12—Organic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G2261/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G2261/30—Monomer units or repeat units incorporating structural elements in the main chain
    • C08G2261/34—Monomer units or repeat units incorporating structural elements in the main chain incorporating partially-aromatic structural elements in the main chain
    • C08G2261/342—Monomer units or repeat units incorporating structural elements in the main chain incorporating partially-aromatic structural elements in the main chain containing only carbon atoms
    • C08G2261/3424—Monomer units or repeat units incorporating structural elements in the main chain incorporating partially-aromatic structural elements in the main chain containing only carbon atoms non-conjugated, e.g. paracyclophanes or xylenes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Physical Vapour Deposition (AREA)
NL656505685A 1964-05-04 1965-05-04 METHOD OF COVERING THE SURFACE OF A SUBSTRATE. NL144201B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US364381A US3379803A (en) 1964-05-04 1964-05-04 Coating method and apparatus for deposition of polymer-forming vapor under vacuum

Publications (2)

Publication Number Publication Date
NL6505685A NL6505685A (en) 1965-11-05
NL144201B true NL144201B (en) 1974-12-16

Family

ID=23434283

Family Applications (1)

Application Number Title Priority Date Filing Date
NL656505685A NL144201B (en) 1964-05-04 1965-05-04 METHOD OF COVERING THE SURFACE OF A SUBSTRATE.

Country Status (4)

Country Link
US (1) US3379803A (en)
DE (1) DE1646153C3 (en)
GB (1) GB1112894A (en)
NL (1) NL144201B (en)

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US3663265A (en) * 1970-11-16 1972-05-16 North American Rockwell Deposition of polymeric coatings utilizing electrical excitation
US3753773A (en) * 1972-04-26 1973-08-21 North American Rockwell Coating of poly-para-heterocyclic-xylene polymer
CA1031919A (en) * 1972-07-17 1978-05-30 Union Carbide Corporation Plural mold process for producing non-uniform pellicles
US3895135A (en) * 1973-05-01 1975-07-15 Union Carbide Corp Masking process with constricted flow path for coating
US3936531A (en) * 1973-05-01 1976-02-03 Union Carbide Corporation Masking process with thermal destruction of edges of mask
US3892892A (en) * 1973-05-01 1975-07-01 Union Carbide Corp Masking process with cold sink
US4226207A (en) * 1978-07-06 1980-10-07 Dso "Cherna Metalurgia" Apparatus for applying protective coatings to graphite bodies
JPS57134558A (en) * 1981-02-16 1982-08-19 Fuji Photo Film Co Ltd Production of organic vapor deposited thin film
FR2526631B1 (en) * 1982-05-12 1985-05-31 Agronomique Inst Nat Rech PROCESS FOR PRODUCING ENCAPSULABLE GLOBULES
US4572846A (en) * 1983-11-18 1986-02-25 Motorola, Inc. Method of hermetically sealing electronic packages
AT380641B (en) * 1984-08-21 1986-06-25 Karl Dipl Ing Dr Czeija DEVICE FOR PRODUCING SEMIPERMEABLES, ASYMMETRIC COMPOSITE FILMS OR SUCH FILTER MEMBRANES FOR REVERSE OSMOSIS PLANTS AND COMPOSITE FILMS PRODUCED IN SUCH A COATING DEVICE
IT1191646B (en) * 1985-12-19 1988-03-23 Montedison Spa PROCESS FOR THE ADHESION OF POLY-P.XYLYLENE TO SUBSTRATES AND ARTICLES OBTAINED
US4808453A (en) * 1987-04-13 1989-02-28 Romberg Val G Pharmaceutical elastomeric coating
IT1222434B (en) * 1987-08-03 1990-09-05 Ausimont Spa LOW PERMEABILITY CONTAINER FOR HYDROCARBON VAPORS AND PROCESS FOR THEIR PRODUCTION
IT1222879B (en) * 1987-10-13 1990-09-12 Ausimont Spa PROCESS FOR THE CONSOLIDATION OF LOW-BASED MATERIALS
WO1990002546A1 (en) * 1988-09-09 1990-03-22 The Ronald T. Dodge Company Pharmaceuticals microencapsulated by vapor deposited polymers and method
US5354286A (en) * 1993-12-07 1994-10-11 Survival Technology, Inc. Injection device having polyparaxylylene coated container
JP4421686B2 (en) * 1996-06-24 2010-02-24 インテルウニフェルシテール ミクロエレクトロニカ セントルム フェライニジンク ゾンダ ウィンストベヤーク Apparatus and method for wet cleaning or etching of flat substrates
US6337102B1 (en) * 1997-11-17 2002-01-08 The Trustees Of Princeton University Low pressure vapor phase deposition of organic thin films
US6045864A (en) * 1997-12-01 2000-04-04 3M Innovative Properties Company Vapor coating method
JPH11227210A (en) 1997-12-05 1999-08-24 Canon Inc Liquid jet head, manufacture thereof, head cartridge and liquid jet unit
GB2340759B (en) * 1998-08-26 2003-05-07 Bespak Plc Improvements in drug delivery devices
US6386686B1 (en) 1998-12-03 2002-05-14 Canon Kabushiki Kaisha Liquid discharge head, manufacturing method of liquid discharge head, head cartridge, and liquid discharge apparatus
JP3986039B2 (en) 1998-12-03 2007-10-03 キヤノン株式会社 Liquid discharge head manufacturing method, liquid discharge head, head cartridge, and liquid discharge recording apparatus
JP2001162804A (en) 1999-12-10 2001-06-19 Canon Inc Liquid ejection head, head cartridge, and device for ejecting liquid
US20040255862A1 (en) * 2001-02-26 2004-12-23 Lee Chung J. Reactor for producing reactive intermediates for low dielectric constant polymer thin films
US6797343B2 (en) 2001-12-20 2004-09-28 Dielectric Systems, Inc. Dielectric thin films from fluorinated precursors
US20030196680A1 (en) * 2002-04-19 2003-10-23 Dielectric Systems, Inc Process modules for transport polymerization of low epsilon thin films
US6881447B2 (en) * 2002-04-04 2005-04-19 Dielectric Systems, Inc. Chemically and electrically stabilized polymer films
US7192645B2 (en) 2001-02-26 2007-03-20 Dielectric Systems, Inc. Porous low E (<2.0) thin films by transport co-polymerization
US6825303B2 (en) 2001-02-26 2004-11-30 Dielectric Systems, Inc. Integration of low ε thin films and Ta into Cu dual damascene
US20040055539A1 (en) * 2002-09-13 2004-03-25 Dielectric Systems, Inc. Reactive-reactor for generation of gaseous intermediates
US7026052B2 (en) * 2001-02-26 2006-04-11 Dielectric Systems, Inc. Porous low k(<2.0) thin film derived from homo-transport-polymerization
US20030198578A1 (en) * 2002-04-18 2003-10-23 Dielectric Systems, Inc. Multi-stage-heating thermal reactor for transport polymerization
US20050274322A1 (en) * 2001-02-26 2005-12-15 Lee Chung J Reactor for producing reactive intermediates for low dielectric constant polymer thin films
US6703462B2 (en) * 2001-08-09 2004-03-09 Dielectric Systems Inc. Stabilized polymer film and its manufacture
US7115304B2 (en) * 2004-02-19 2006-10-03 Nanosolar, Inc. High throughput surface treatment on coiled flexible substrates
US7094661B2 (en) * 2004-03-31 2006-08-22 Dielectric Systems, Inc. Single and dual damascene techniques utilizing composite polymer dielectric film
US6962871B2 (en) * 2004-03-31 2005-11-08 Dielectric Systems, Inc. Composite polymer dielectric film
US7309395B2 (en) 2004-03-31 2007-12-18 Dielectric Systems, Inc. System for forming composite polymer dielectric film
US20060201426A1 (en) * 2004-05-25 2006-09-14 Lee Chung J Reactor for Producing Reactive Intermediates for Transport Polymerization
US20060046044A1 (en) * 2004-08-24 2006-03-02 Lee Chung J Porous composite polymer dielectric film
US20060274474A1 (en) * 2005-06-01 2006-12-07 Lee Chung J Substrate Holder
US20060275547A1 (en) * 2005-06-01 2006-12-07 Lee Chung J Vapor Phase Deposition System and Method
DE102005040648A1 (en) 2005-08-27 2007-03-01 Leybold Vacuum Gmbh Process for coating valve metal or alloy for e.g. aluminum or alloy rotor for turbomolecular pump involves vapor coating with optionally halogenated xylylene dimer and polymerization in capillary system of surface film of oxide ceramic
DE102005058869A1 (en) * 2005-12-09 2007-06-14 Cis Solartechnik Gmbh & Co. Kg Method and device for coating strips
DE602007014190D1 (en) * 2006-03-26 2011-06-09 Lotus Applied Technology Llc ATOMIC LAYER DEPOSITION SYSTEM AND METHOD FOR COATING FLEXIBLE SUBSTRATES
US20070281089A1 (en) * 2006-06-05 2007-12-06 General Electric Company Systems and methods for roll-to-roll atomic layer deposition on continuously fed objects
GB0614621D0 (en) * 2006-07-24 2006-08-30 3M Innovative Properties Co Metered dose dispensers
US8506984B2 (en) * 2006-07-26 2013-08-13 Cordis Corporation Therapeutic agent elution control process
EP2099964B1 (en) * 2006-11-13 2018-02-14 Serge Ferrari Tersuisse AG Coated threadlike object with improved electrical conductance and/or improved optical reflection and device for treating the surface of a threadlike object
DE112008003735T5 (en) * 2008-02-29 2011-02-17 Yasui Seiki Co., Ltd. Apparatus for producing a composite material film web
WO2009158613A1 (en) * 2008-06-26 2009-12-30 West Pharmaceutical Services, Inc. Method of coating polyxylylene onto flouropolymer surfaces and devices coated thereby
BR112012008642A2 (en) 2009-10-14 2017-06-13 Lotus Applied Tech Llc inhibition of precursor excess transport between separate precursor zones in an atomic layer deposition system.
US10544502B2 (en) 2009-11-30 2020-01-28 Xefco Pty Ltd Functional composite garment materials
KR101279606B1 (en) * 2009-12-11 2013-07-05 한국전자통신연구원 Method for depositing graphene film
US8723042B2 (en) * 2011-03-17 2014-05-13 Electronics And Telecommunications Research Institute Flexible flat cable and manufacturing method thereof
EP2833467A4 (en) * 2012-03-30 2015-11-18 Kojima Ind Corp Process and device for producing lithium-ion secondary battery
US20160186320A1 (en) * 2014-12-26 2016-06-30 Metal Industries Research And Development Centre Apparatus for continuously forming a film through chemical vapor deposition
FR3044023B1 (en) * 2015-11-19 2017-12-22 Herakles DEVICE FOR COATING ONE OR MORE WIRES BY A STEAM-PHASE DEPOSITION PROCESS
DE102019007935B4 (en) * 2019-11-14 2023-06-29 Elfolion Gmbh Process for processing flexible substrates and vacuum processing system for implementing the process

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US2879739A (en) * 1955-01-13 1959-03-31 Nat Res Corp Vaporized metal coating apparatus
US2971862A (en) * 1957-04-26 1961-02-14 Nat Res Corp Vapor deposition method and apparatus
US3043715A (en) * 1958-08-13 1962-07-10 Nat Res Corp Method and apparatus for vacuum coating metallic substrates
US3181209A (en) * 1961-08-18 1965-05-04 Temescal Metallurgical Corp Foil production
US3301707A (en) * 1962-12-27 1967-01-31 Union Carbide Corp Thin film resistors and methods of making thereof

Also Published As

Publication number Publication date
DE1646153A1 (en) 1971-03-18
NL6505685A (en) 1965-11-05
US3379803A (en) 1968-04-23
DE1646153C3 (en) 1974-05-02
GB1112894A (en) 1968-05-08
DE1646153B2 (en) 1973-09-13

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