MY137488A - Method for manufacturing semiconductor device and heat-resistant pressure-sensitive adhesive tape for use therein - Google Patents
Method for manufacturing semiconductor device and heat-resistant pressure-sensitive adhesive tape for use thereinInfo
- Publication number
- MY137488A MY137488A MYPI20032144A MYPI20032144A MY137488A MY 137488 A MY137488 A MY 137488A MY PI20032144 A MYPI20032144 A MY PI20032144A MY PI20032144 A MYPI20032144 A MY PI20032144A MY 137488 A MY137488 A MY 137488A
- Authority
- MY
- Malaysia
- Prior art keywords
- sensitive adhesive
- heat
- adhesive tape
- resistant pressure
- semiconductor device
- Prior art date
Links
Classifications
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- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
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Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Adhesive Tapes (AREA)
- Lead Frames For Integrated Circuits (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Dicing (AREA)
Abstract
A METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE (21A) OF THE PRESENT INVENTION, COMPRISES THE STEPS OF MOUNTING AND BONDING SEMICONDUCTOR CHIPS (15) ONTO DIE PADS (11C) OF A METAL LEAD FRAME (10) HAVING AN OUTER PAD SIDE TO WHICH A HEAT-RESISTANT PRESSURE-SENSITIVE ADHESIVE TAPE (20) IS ATTACHED; WIRING A BONDING WIRE (16) BETWEEN EACH TERMINATION OF THE LEAD FRAME (10) AND EACH ELECTRODE PAD (15A) ON THE SEMICONDUCTOR CHIPS (15) SEALING SEMICONDUCTOR CHIPS (15) IN A SEALING RESIN (17) FROM ONE SIDE; AND CUTTING THE SEALED BODY INTO INDIVIDUAL SEMICONDUCTOR DEVICES (21 A). IN THIS INVENTION, THE HEAT-RESISTANT PRESSURE-SENSITIVE ADHESIVE TAPE (20) COMPRISES A BASE LAYER MADE OF A POLYIMIDE RESIN AND A PRESSURE-SENSITIVE ADHESIVE LAYER WITH A THICKNESS OF 1 TO 20 µM THAT IS MADE OF AN ACRYLIC RESIN AND HAS A STORAGE ELASTIC MODULUS OF AT LEAST 1.0 X 105 PA AT 200°C.FIG. 1
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002168689A JP3849978B2 (en) | 2002-06-10 | 2002-06-10 | Semiconductor device manufacturing method and heat-resistant adhesive tape used therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
MY137488A true MY137488A (en) | 2009-02-27 |
Family
ID=29996443
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI20032144A MY137488A (en) | 2002-06-10 | 2003-06-09 | Method for manufacturing semiconductor device and heat-resistant pressure-sensitive adhesive tape for use therein |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP3849978B2 (en) |
CN (1) | CN1320619C (en) |
HK (1) | HK1059501A1 (en) |
MY (1) | MY137488A (en) |
SG (1) | SG108923A1 (en) |
TW (1) | TWI281220B (en) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4610168B2 (en) * | 2003-08-06 | 2011-01-12 | スリーエム イノベイティブ プロパティズ カンパニー | Heat resistant masking tape |
KR20050083322A (en) * | 2004-02-23 | 2005-08-26 | 삼성테크윈 주식회사 | Lead frame for semiconductor package and the fabrication method thereof |
JP4679896B2 (en) * | 2004-12-20 | 2011-05-11 | リンテック株式会社 | Heat-resistant adhesive tape for semiconductors |
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Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2708191B2 (en) * | 1988-09-20 | 1998-02-04 | 株式会社日立製作所 | Semiconductor device |
US5173766A (en) * | 1990-06-25 | 1992-12-22 | Lsi Logic Corporation | Semiconductor device package and method of making such a package |
JP3309686B2 (en) * | 1995-03-17 | 2002-07-29 | セイコーエプソン株式会社 | Resin-sealed semiconductor device and method of manufacturing the same |
JPH10154777A (en) * | 1996-11-25 | 1998-06-09 | Hitachi Ltd | Semiconductor device |
JP2891233B2 (en) * | 1997-04-11 | 1999-05-17 | 日本電気株式会社 | Semiconductor device |
JP2947223B2 (en) * | 1997-06-09 | 1999-09-13 | 日本電気株式会社 | Method for manufacturing semiconductor device |
JP2954110B2 (en) * | 1997-09-26 | 1999-09-27 | 九州日本電気株式会社 | CSP type semiconductor device and manufacturing method thereof |
JP4357754B2 (en) * | 2000-10-02 | 2009-11-04 | 日東電工株式会社 | Manufacturing method of semiconductor device |
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2002
- 2002-06-10 JP JP2002168689A patent/JP3849978B2/en not_active Expired - Lifetime
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2003
- 2003-06-02 TW TW092114894A patent/TWI281220B/en not_active IP Right Cessation
- 2003-06-03 SG SG200303252A patent/SG108923A1/en unknown
- 2003-06-09 MY MYPI20032144A patent/MY137488A/en unknown
- 2003-06-10 CN CNB03142354XA patent/CN1320619C/en not_active Expired - Fee Related
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2004
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TWI281220B (en) | 2007-05-11 |
TW200400577A (en) | 2004-01-01 |
HK1059501A1 (en) | 2004-07-02 |
JP3849978B2 (en) | 2006-11-22 |
JP2004014930A (en) | 2004-01-15 |
CN1320619C (en) | 2007-06-06 |
SG108923A1 (en) | 2005-02-28 |
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