MX9603436A - Metodo y aparato para tratamiento gaseoso. - Google Patents
Metodo y aparato para tratamiento gaseoso.Info
- Publication number
- MX9603436A MX9603436A MX9603436A MX9603436A MX9603436A MX 9603436 A MX9603436 A MX 9603436A MX 9603436 A MX9603436 A MX 9603436A MX 9603436 A MX9603436 A MX 9603436A MX 9603436 A MX9603436 A MX 9603436A
- Authority
- MX
- Mexico
- Prior art keywords
- treatment
- fixture device
- gaseous treatment
- article
- hydrophilicity
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L9/00—Supporting devices; Holding devices
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Clinical Laboratory Science (AREA)
- Eyeglasses (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Treatment Of Fiber Materials (AREA)
Abstract
Un dispositivo de fijacion y método para tratar de una manera uniforme y eficiente un artículo en una atmosfera gaseosa. El dispositivo de fijacion proporciona una pluralidad de localizaciones de soporte de punto de contacto para soportar el artículo durante el tratamiento. El dispositivo de fijacion y el método de tratamiento son especialmente utiles en el tratamiento con plasma de lentes de contacto para mejorar la biocompatibilidad e hidrofilicidad superficiales.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US515633 | 1995-08-16 | ||
US08/515,633 US5874127A (en) | 1995-08-16 | 1995-08-16 | Method and apparatus for gaseous treatment |
US515,633 | 1995-08-16 |
Publications (2)
Publication Number | Publication Date |
---|---|
MX9603436A true MX9603436A (es) | 1997-07-31 |
MXPA96003436A MXPA96003436A (es) | 1997-12-01 |
Family
ID=
Also Published As
Publication number | Publication date |
---|---|
ZA966923B (en) | 1997-02-17 |
ES2148717T3 (es) | 2000-10-16 |
ATE194667T1 (de) | 2000-07-15 |
HU9602243D0 (en) | 1996-10-28 |
DE69609265T2 (de) | 2000-12-14 |
AU717460B2 (en) | 2000-03-30 |
US5874127A (en) | 1999-02-23 |
SG47169A1 (en) | 1998-03-20 |
NO963416L (no) | 1997-02-17 |
DE69609265D1 (de) | 2000-08-17 |
NZ299168A (en) | 1998-12-23 |
JPH09117713A (ja) | 1997-05-06 |
GR3034336T3 (en) | 2000-12-29 |
EP0758687B1 (en) | 2000-07-12 |
AU6200496A (en) | 1997-02-20 |
HUP9602243A2 (en) | 1997-05-28 |
NO310763B1 (no) | 2001-08-27 |
PL315701A1 (en) | 1997-02-17 |
CA2183310C (en) | 2008-03-18 |
CN1149085A (zh) | 1997-05-07 |
AR003294A1 (es) | 1998-07-08 |
CZ240396A3 (en) | 1997-07-16 |
TW345622B (en) | 1998-11-21 |
DK0758687T3 (da) | 2000-10-23 |
BR9603442A (pt) | 1998-05-12 |
CA2183310A1 (en) | 1997-02-17 |
PT758687E (pt) | 2000-12-29 |
NO963416D0 (no) | 1996-08-15 |
EP0758687A1 (en) | 1997-02-19 |
IL119038A (en) | 2000-11-21 |
HUP9602243A3 (en) | 1997-12-29 |
IL119038A0 (en) | 1996-11-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CA2183310A1 (en) | Method and apparatus for gaseous treatment | |
TW343370B (en) | Method and apparatus for both mechanically and electrostatically clamping a wafer to a pedestal within a semiconductor wafer processing system | |
ATE167401T1 (de) | Vorrichtung und verfahren für trockensterilisierung medizinischer geräte und materialien | |
TW358219B (en) | Apparatus and method for cleaning semiconductor wafers | |
GB2343550A (en) | Cluster tool method and apparatus using plasma immersion ion implantation | |
DE69032691D1 (de) | Verfahren und Gerät zur Plasmabehandlung unter atmosphärischem Druck | |
DE3856502D1 (de) | Verfahren und Vorrichtung zur Trockensterilisierung medizinischer Geräte und Materialien | |
GB9624135D0 (en) | Method and apparatus for hydrogen peroxide vapor sterilization | |
EP0848765A4 (en) | METHOD AND APPARATUS FOR ELECTROCHEMICAL SURFACE TREATMENT | |
ITMI913198A0 (it) | Procedimento e apparecchiatura per controllare la concentrazione della sorgente di carbonio in una coltura aerobica di un microorganismo | |
EP0731498A3 (en) | Surface treatment process for silicon substrates and device therefor | |
AU2359997A (en) | Treatment method in glow-discharge plasma and apparatus thereof | |
EP0725164A3 (en) | Method and apparatus for generating plasma and semiconductor processing methods | |
NO983657D0 (no) | Fremgangsmåte og apparat for overflatesterilisering av gjenstander samt system egnet for sterilisering av flasker | |
EP0753189A4 (en) | METHOD AND DEVICE FOR PRODUCING HOMOGENEOUS LIGHTING | |
ATE205332T1 (de) | Verfahren und vorrichtung zum einseitigen bearbeiten scheibenförmiger gegenstände | |
TW444876U (en) | Surface activating process, and device and lamp for performing said process | |
AU641571B2 (en) | Method for treating gas and apparatus used therefor | |
SI0849057T1 (en) | Apparatus and method for surface treatment of elongated articles | |
DE69713818D1 (de) | Vorrichtung in Kleinbauweise zur Erzeugung eines atmosphärischen Plasmas und Verfahren zur Oberflächenbehandlung | |
ECSP961849A (es) | Metodo y aparato para tratamiento gaseoso | |
AU7070296A (en) | Method and device for testing the hardness of workpieces and device for carrying out this process | |
EP0769668A3 (de) | Verfahren und Anlage zum Aufbereiten von stickstoffhaltigem Erdgas | |
ES2107672T3 (es) | Aparato y metodo para tratar una oblea de material semiconductor. | |
GB2366530A (en) | Jig cleaning |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG | Grant or registration | ||
MM | Annulment or lapse due to non-payment of fees |