MX2016010066A - X-ray diffraction analyzer and analyzing method. - Google Patents

Abstract

The X-ray diffraction analyzer (1) according to an embodiment of the present invention is provided with: a measurement unit (2) for measuring the X-ray diffraction intensity profile of a test sample (16); a distance measurement unit (9) for measuring the separation distance (Z) between the test sample (16) and the measurement unit (2); and a data processing unit (10) for correction processing of the X-ray diffraction intensity profile. The measurement unit (2) has an X-ray irradiation unit (3) for irradiating the test sample (16) with X-rays, an X-ray detection unit (6) for one-dimensional detection or two-dimensional detection of multiple refracted X-rays from the test sample (16), and a chassis (8) in which the X-ray irradiation unit (3) and the X-ray detection unit (6) are fixedly arranged relative to a reference plane (17). The data processing unit (10) calculates displacement (?Z) of the test sample (16) on the basis of the separation distance (Z); in accordance with the calculated displacement (?Z), calculates the true X-ray diffraction angle (2θ) at the measurement point on the test sample (16); and corrects the X-ray diffraction intensity profile on the basis of the calculated true X-ray diffraction angle (2θ).