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Zhang et al., 2019 - Google Patents

Phase unwrapping in optical metrology via denoised and convolutional segmentation networks

Zhang et al., 2019

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Document ID
348734364215745124
Author
Zhang J
Tian X
Shao J
Luo H
Liang R
Publication year
Publication venue
Optics express

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Snippet

The interferometry technique is commonly used to obtain the phase information of an object in optical metrology. The obtained wrapped phase is subject to a 2π ambiguity. To remove the ambiguity and obtain the correct phase, phase unwrapping is essential. Conventional …
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    • GPHYSICS
    • G06COMPUTING; CALCULATING; COUNTING
    • G06FELECTRICAL DIGITAL DATA PROCESSING
    • G06F17/00Digital computing or data processing equipment or methods, specially adapted for specific functions
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    • GPHYSICS
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    • GPHYSICS
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    • G06KRECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K9/00Methods or arrangements for reading or recognising printed or written characters or for recognising patterns, e.g. fingerprints
    • G06K9/36Image preprocessing, i.e. processing the image information without deciding about the identity of the image
    • G06K9/46Extraction of features or characteristics of the image
    • GPHYSICS
    • G06COMPUTING; CALCULATING; COUNTING
    • G06KRECOGNITION OF DATA; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K9/00Methods or arrangements for reading or recognising printed or written characters or for recognising patterns, e.g. fingerprints
    • G06K9/62Methods or arrangements for recognition using electronic means
    • GPHYSICS
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    • G06NCOMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS
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    • G06N5/04Inference methods or devices
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    • G06N3/00Computer systems based on biological models
    • G06N3/02Computer systems based on biological models using neural network models
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