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Fang et al., 2013 - Google Patents

AM-AFM system analysis and output feedback control design with sensor saturation

Fang et al., 2013

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Document ID
2906665590834614877
Author
Fang Y
Zhang Y
Qi N
Dong X
Publication year
Publication venue
IEEE transactions on nanotechnology

External Links

Snippet

This paper analyzes the dynamics of an amplitude-modulation atomic force microscopy (AM- AFM) system, and designs a novel output feedback robust adaptive control (OFRAC) law to improve the scanning performance of the AM-AFM system. That is, a control-oriented …
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators

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