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Hernandez-Rueda et al., 2015 - Google Patents

Nanofabrication of tailored surface structures in dielectrics using temporally shaped femtosecond-laser pulses

Hernandez-Rueda et al., 2015

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Document ID
2843616014804001240
Author
Hernandez-Rueda J
Götte N
Siegel J
Soccio M
Zielinski B
Sarpe C
Wollenhaupt M
Ezquerra T
Baumert T
Solis J
Publication year
Publication venue
ACS applied materials & interfaces

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We have investigated the use of tightly focused, temporally shaped femtosecond (fs)-laser pulses for producing nanostructures in two dielectric materials (sapphire and phosphate glass) with different characteristics in their response to pulsed laser radiation. For this …
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