Logothetidis et al., 1997 - Google Patents
Studies of density and surface roughness of ultrathin amorphous carbon films with regards to thickness with x-ray reflectometry and spectroscopic ellipsometryLogothetidis et al., 1997
- Document ID
- 2837883539242993948
- Author
- Logothetidis S
- Stergioudis G
- Publication year
- Publication venue
- Applied physics letters
External Links
Snippet
Specular x-ray reflectivity (XRR) measurements were used to study the density and surface roughness of ultrathin hydrogen-free amorphous carbon films deposited by sputtering, of thickness varying from 25 to 325 Å. The film thickness and surface roughness obtained from …
- 238000000560 X-ray reflectometry 0 title abstract description 29
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