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Womack et al., 2004 - Google Patents

Femtosecond pulsed laser ablation and deposition of thin films of polytetrafluoroethylene

Womack et al., 2004

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Document ID
2749751015436789512
Author
Womack M
Vendan M
Molian P
Publication year
Publication venue
Applied Surface Science

External Links

Snippet

A Ti: Sapphire (IR, 800nm) femtosecond pulsed laser was used to deposit thin films (< 1μm) of polytetrafluoroethylene (PTFE) on single crystal silicon (100) wafers. Scanning electron microscopy, atomic force microscopy, X-ray diffraction, X-ray photoelectron spectroscopy …
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation

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