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Hayashi et al., 1993 - Google Patents

Preparation and Properties of Ferroelectric BaTiO Thin Films by Sol-Gel Process

Hayashi et al., 1993

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Document ID
2569574173252345321
Author
Hayashi T
Ohji N
Hirohara K
Fukunaga T
Maiwa H
Publication year
Publication venue
Japanese journal of applied physics

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Snippet

Ferroelectric BaTiOg thin films have been successfully prepared by sol-gel process using barium and titanium isopropoxides as precursor solutions for dip-coating. Homogeneous BaTiOg thin films have been obtained on vari-ous substrates by preheating gel films at 120 …
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    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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    • C23C16/405—Oxides of refractory metals or yttrium
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    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
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    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
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