Brueckner et al., 2008 - Google Patents
Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonatorsBrueckner et al., 2008
- Document ID
- 2525871292751730402
- Author
- Brueckner K
- Niebelschuetz F
- Tonisch K
- Michael S
- Dadgar A
- Krost A
- Cimalla V
- Ambacher O
- Stephan R
- Hein M
- Publication year
- Publication venue
- Applied Physics Letters
External Links
Snippet
Free-standing piezoelectric AlGaN/GaN beam resonators have been prepared on silicon substrates. The two-dimensional electron gas at the interface of the III/V heterostructure has been employed to act as back electrode for the piezoelectric active layer. The fundamental …
- 229910002601 GaN 0 title abstract description 23
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L41/08—Piezo-electric or electrostrictive devices
- H01L41/09—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators
- H01L41/0926—Piezo-electric or electrostrictive devices with electrical input and mechanical output, e.g. actuators, vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
-
- H—ELECTRICITY
- H03—BASIC ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02244—Details of micro-electro-mechanical resonators
- H03H2009/02488—Vibration modes
- H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Karabalin et al. | Piezoelectric nanoelectromechanical resonators based on aluminum nitride thin films | |
| Su et al. | AlScN-based MEMS magnetoelectric sensor | |
| Brueckner et al. | Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonators | |
| Verbridge et al. | High quality factor resonance at room temperature with nanostrings under high tensile stress | |
| Lin et al. | Thermally compensated aluminum nitride Lamb wave resonators for high temperature applications | |
| Dohn et al. | Enhanced functionality of cantilever based mass sensors using higher modes | |
| Schmid et al. | Damping mechanisms of single-clamped and prestressed double-clamped resonant polymer microbeams | |
| Kulkarni et al. | Giant magnetoelectric effect at low frequencies in polymer-based thin film composites | |
| Vignola et al. | Effect of viscous loss on mechanical resonators designed for mass detection | |
| Verbridge et al. | A megahertz nanomechanical resonator with room temperature quality factor over a million | |
| Wang et al. | Vibration energy harvesting device based on air-spaced piezoelectric cantilevers | |
| Ivaldi et al. | 50 nm thick AlN film-based piezoelectric cantilevers for gravimetric detection | |
| Xu et al. | A single crystal lead magnesium niobate-lead titanate multilayer-stacked cryogenic flextensional actuator | |
| Erturk et al. | Power generation and shunt damping performance of a single crystal lead magnesium niobate-lead zirconate titanate unimorph: Analysis and experiment | |
| Ray et al. | Al-doped ZnO thin-film transistor embedded micro-cantilever as a piezoresistive sensor | |
| Cho et al. | Efficiency of energy conversion by piezoelectrics | |
| Park et al. | Micro-fabricated lead zirconate titanate bent cantilever energy harvester with multi-dimensional operation | |
| Mortet et al. | Wide range pressure sensor based on a piezoelectric bimorph microcantilever | |
| Clementi et al. | Highly coupled and low frequency vibrational energy harvester using lithium niobate on silicon | |
| Chandrahalim et al. | Performance comparison of Pb (Zr0. 52Ti0. 48) O3-only and Pb (Zr0. 52Ti0. 48) O3-on-silicon resonators | |
| Ghatge et al. | A 30-nm thick integrated hafnium zirconium oxide nano-electro-mechanical membrane resonator | |
| Cimalla et al. | Pulsed mode operation of strained microelectromechanical resonators in air | |
| Metcalf et al. | Thermoelastic damping in micromechanical resonators | |
| Pernpeintner et al. | Circuit electromechanics with a non-metallized nanobeam | |
| Jikyo et al. | Piezoelectric unimorph microcantilevers for measuring direct and converse piezoelectric coefficients |