[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Ballestra et al., 2008 - Google Patents

Experimental-numerical comparison of the cantilever MEMS frequency shift in presence of a residual stress gradient

Ballestra et al., 2008

View HTML
Document ID
2045660005589586442
Author
Ballestra A
Somà A
Pavanello R
Publication year
Publication venue
Sensors

External Links

Snippet

The dynamic characterization of a set of gold micro beams by electrostatic excitation in presence of residual stress gradient has been studied experimentally. A method to determine the micro-cantilever residual stress gradient by measuring the deflection and …
Continue reading at www.mdpi.com (HTML) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by the preceding groups
    • G01N33/48—Investigating or analysing materials by specific methods not covered by the preceding groups biological material, e.g. blood, urine; Haemocytometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves

Similar Documents

Publication Publication Date Title
Chuang et al. Review on the modeling of electrostatic MEMS
Chu et al. A high sensitivity electric field microsensor based on torsional resonance
Zhao et al. A MEMS resonant sensor to measure fluid density and viscosity under flexural and torsional vibrating modes
Badarlis et al. Measurement and evaluation of the gas density and viscosity of pure gases and mixtures using a micro-cantilever beam
Ren et al. Design and analyses of a MEMS based resonant magnetometer
Oria et al. Finite element analysis of electrically excited quartz tuning fork devices
Zhang et al. Nonlinear dynamics and chaos of microcantilever-based TM-AFMs with squeeze film damping effects
Mirzazadeh et al. Uncertainty quantification of microstructure—Governed properties of polysilicon MEMS
Schut et al. μ-Coriolis mass flow sensor with resistive readout
Takayama et al. Developing a MEMS device with built-in microfluidics for biophysical single cell characterization
Stachiv et al. Mass detection in viscous fluid utilizing vibrating micro-and nanomechanical mass sensors under applied axial tensile force
Ballestra et al. Experimental-numerical comparison of the cantilever MEMS frequency shift in presence of a residual stress gradient
Babaei et al. Free vibration analysis of rotating beams based on the modified couple stress theory and coupled displacement field
Wedrich et al. Stiffness considerations for a MEMS-based weighing cell
Liu et al. Modeling the piezoelectric cantilever resonator with different width layers
Rinaldi et al. Quantitative boundary support characterization for cantilever MEMS
Xu et al. Simulation-based design and optimization of rectangular micro-cantilever-based aerosols mass sensor
Wang et al. MEMS device for quantitative in situ mechanical testing in electron microscope
Peng et al. A low-G silicon inertial micro-switch with enhanced contact effect using squeeze-film damping
Yan et al. Pull-in effect of suspended microchannel resonator sensor subjected to electrostatic actuation
Eltagoury et al. Electrostatic comb-drive actuator with high in-plane translational velocity
Pour et al. Modeling and design enhancement of electrothermal actuators for microgripping applications
Ak et al. A new analytical model to estimate the voltage value and position of the pull-in limit of a MEMS cantilever
Zhong et al. Dynamic characteristics of micro-beams considering the effect of flexible supports
Zhou et al. A novel measurement method of mechanical properties for individual layers in multilayered thin films