Wolfshtein et al., 1989 - Google Patents
A superconducting magnetic levitation device for the transport of light payloadsWolfshtein et al., 1989
- Document ID
- 1906347420396247986
- Author
- Wolfshtein D
- Seidel T
- Johnson D
- Rhodes W
- Publication year
- Publication venue
- Journal of Superconductivity
External Links
Snippet
A device for the frictionless transport of light payloads, eg, silicon wafers, using superconducting magnetic levitation has been demonstrated. The device consists of an array of rigidly connected “carrier” magnets levitating above a corresponding array of …
- 238000005339 levitation 0 title abstract description 22
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
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