[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Bel’chenko et al., 1984 - Google Patents

Pulsed multiampere source of negative hydrogen ions

Bel’chenko et al., 1984

View PDF
Document ID
1878656542397219822
Author
Bel’chenko Y
Dimov G
Publication year
Publication venue
AIP Conference Proceedings

External Links

Snippet

A description is given of a pulsed model of a multiampere honeycomb surface plasma source of negative hydrogen ions (H−). The H− emitter is the cesium‐coated cathode surface in a high‐current, glow discharge; the surface consists of a large number of …
Continue reading at www.researchgate.net (PDF) (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/08—Ion sources
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/54—Plasma accelerators

Similar Documents

Publication Publication Date Title
Bugaev et al. The ‘‘TITAN’’ion source
Vintizenko et al. Hollow-cathode low-pressure arc discharges and their application in plasma generators and charged-particle sources
US4749910A (en) Electron beam-excited ion beam source
Humphries Jr et al. Pulsed plasma guns for intense ion beam injectors
Okumura et al. Quasi–dc extraction of 70 keV, 5 A ion beam
Belchenko et al. Negative ion surface-plasma source development for fusion in Novosibirsk
Mori Negative metal ion sources
Bel’chenko et al. Pulsed multiampere source of negative hydrogen ions
Davydenko et al. Optimization of an ion-optics system with “thick” electrodes for the diagnostic neutral beam injector of the TEXTOR tokamak
Ishikawa et al. Ion beam extraction with ion space‐charge compensation in beam‐plasma type ion source
Yamagiwa et al. Performance of double-stage-discharge Hall ion thruster
Kwan High current ion sources and injectors for induction linacs in heavy ion fusion
Belchenko et al. Studies of surface-plasma negative ion sources at Novosibirsk
Takeiri et al. Long-pulse operation of a cesium-seeded high-current large negative ion source
Bugaev et al. “Titan,” a source of gas and metal ions based on a contracted discharge and vacuum arc
Kowalewicz et al. Enhanced energy loss of heavy ions passing a fully ionized hydrogen plasma
Skalyga et al. Status of new developments in the field of high-current gasdynamic ECR ion sources at the IAP RAS
Slutz et al. Ion divergence in magnetically insulated diodes
Abdrashitov et al. Characteristics of a high-power RF source of negative hydrogen ions for neutral beam injection into controlled fusion devices
Belchenko et al. Multiampere negative ion source development at Novosibirsk
Clark Recent progress in heavy ion sources
Jacquot et al. Negative ion production in large volume source with small deposition of cesium
Kaneko et al. Negative-ion-based neutral beam injector for Large Helical Device
Reiser Recent advances in collective ion accelerators
Stepanov et al. Investigation of the characteristics of an intense ion beam propagated outside the diode