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Ming et al., 2014 - Google Patents

Study of Ar+ O 2 deposition pressures on properties of pulsed laser deposited CdTe thin films at high substrate temperature

Ming et al., 2014

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Document ID
18244568459246207409
Author
Ming Z
Ding C
Li B
Feng L
Wu J
Publication year
Publication venue
Journal of Materials Science: Materials in Electronics

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Snippet

Cadmium telluride (CdTe) thin films deposited by pulsed laser deposition (PLD) on fluorine– tin–oxide substrates under different pressures of argon (Ar)+ oxygen (O 2) at high substrate temperature (T s= 500° C) was reported in this paper. In our work, the CdTe thin films were …
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
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