[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Kang et al., 2001 - Google Patents

Optimized oxygen plasma etching of polycarbonate for low-loss optical waveguide fabrication

Kang et al., 2001

View PDF
Document ID
18121872422758172007
Author
Kang J
Kim J
Kim J
Publication year
Publication venue
Japanese Journal of Applied Physics

External Links

Snippet

The oxygen plasma etching condition of polycarbonate was characterized in detail to fabricate low-loss optical waveguides. The effects of etching parameters such as rf power and chamber pressure were systematically studied and the parameters were optimized to …
Continue reading at www.researchgate.net (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths
    • G02B6/1221—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths made from organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/132—Integrated optical circuits characterised by the manufacturing method by deposition of thin films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/10—Light guides of the optical waveguide type
    • G02B6/105—Light guides of the optical waveguide type having optical polarisation effects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G02B6/364—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves inverted grooves, e.g. dovetails
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/02—Optical fibre with cladding with or without a coating
    • G02B6/02057—Optical fibre with cladding with or without a coating comprising gratings
    • G02B6/02066—Gratings having a surface relief structure, e.g. repetitive variation in diameter of core or cladding
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02F—DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH IS MODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THE DEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY, COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g. SWITCHING, GATING, MODULATING OR DEMODULATING; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; FREQUENCY-CHANGING; NON-LINEAR OPTICS; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
    • G02F1/061—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material
    • G02F1/065—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating, or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on electro-optical organic material in an optical waveguide structure

Similar Documents

Publication Publication Date Title
Kim et al. Simple and low cost fabrication of thermally stable polymeric multimode waveguides using a UV-curable epoxy
Kang et al. Optimized oxygen plasma etching of polycarbonate for low-loss optical waveguide fabrication
Zhao et al. Polymer waveguides useful over a very wide wavelength range from the ultraviolet to infrared
Wang et al. Fabrication of a new broadband waveguide polarizer with a double-layer 190 nm period metal-gratings using nanoimprint lithography
Fischbeck et al. Novel design concept for single-mode polymer waveguides
WO2001014929A1 (en) Integrated hybrid optoelectronic devices
Kim et al. Low-loss polymer-based long-range surface plasmon-polariton waveguide
Chen et al. Vertically tapered polymer waveguide mode size transformer for improved fiber coupling
Kim et al. Passive alignment method of polymer PLC devices by using a hot embossing technique
Chen et al. Optimized Oxygen Plasma Etching of Polyurethane‐Based Electro‐optic Polymer for Low Loss Optical Waveguide Fabrication
Maruo et al. Embedded channel polyimide waveguide fabrication by direct electron beam writing method
Jiang et al. All-polymer photonic devices using excimer laser micromachining
Diez et al. Direct patterning of polymer optical periodic nanostructures on CYTOP for visible light waveguiding
Kagami et al. Simultaneous fabrication of optical channel waveguides and out-of-plane branching mirrors from a polymeric slab structure
Chen et al. Integrated polymer waveguide mode size transformer with a vertical taper for improved fiber coupling
Chen et al. Fabrication and characterization of benzocyclobutene optical waveguides by UV pulsed-laser illumination
Han et al. Chloro-fluorinated polyimides for low loss optical waveguides application
Wang et al. Fabrication of single-mode ridge SU-8 waveguides based on inductively coupled plasma etching
Kutsche et al. Microlithographic patterning of polythiophene films
Diffey et al. Fabrication of low-loss optical-quality polymer waveguide facets in multilayer polymer devices using an inductively coupled plasma
Kim et al. Polymer Planar‐Lightwave‐Circuit‐Type Variable Optical Attenuator Fabricated by Hot Embossing Process
Kim et al. A collimation mirror in polymeric planar waveguide formed by reactive ion etching
Mejia Development of IMOS technology for a high bandwidth modulator
Kim et al. Thermally stable optical waveguide using polycarbonate
Avdeev et al. Tutorial on Silicon Photonics Integrated Platform Fiber Edge Coupling