Higashiwaki et al., 2004 - Google Patents
InAlN/GaN heterostructure field-effect transistors grown by plasma-assisted molecular-beam epitaxyHigashiwaki et al., 2004
- Document ID
- 18009096433780458605
- Author
- Higashiwaki M
- Matsui T
- Publication year
- Publication venue
- Japanese journal of applied physics
External Links
Snippet
We report on the plasma-assisted molecular-beam epitaxy growth and device characteristics of InAlN/GaN heterostructure field-effect transistors (HFETs). The In mole fraction in InAlN was estimated to be 0.15 from the X-ray diffraction profile. The surface root-mean-square …
- 229910002601 GaN 0 title abstract description 43
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