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Shin et al., 2011 - Google Patents

Effects of different annealing atmospheres on the surface and microstructural properties of ZnO thin films grown on p-Si (1 0 0) substrates

Shin et al., 2011

Document ID
17643315666106216467
Author
Shin J
No Y
Lee J
Kim J
Choi W
Kim T
Publication year
Publication venue
Applied surface science

External Links

Snippet

Abstract Effects of different annealing atmospheres on the surface and microstructural properties of ZnO thin films grown on Si (1 0 0) substrates were investigated. X-ray diffraction results showed that the crystallinity of the ZnO thin film annealed in an oxygen atmosphere …
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