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Greczynski et al., 2012 - Google Patents

Selection of metal ion irradiation for controlling Ti1− xAlxN alloy growth via hybrid HIPIMS/magnetron co-sputtering

Greczynski et al., 2012

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Document ID
17509731865344148184
Author
Greczynski G
Lu J
Johansson M
Jensen J
Petrov I
Greene J
Hultman L
Publication year
Publication venue
Vacuum

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We demonstrate, for the first time, the growth of metastable single-phase NaCl-structure high- AlN-content Ti1− xAlxN alloys (x≤ 0.64) which simultaneously possess high hardness and low residual stress. The films are grown using a hybrid approach combining high-power …
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