Singh et al., 2019 - Google Patents
Stress compensated MEMS magnetic actuator based on magnetostrictive Fe65Co35 thin filmsSingh et al., 2019
- Document ID
- 17568827075539227155
- Author
- Singh J
- Kumar A
- Chelvane J
- Publication year
- Publication venue
- Sensors and Actuators A: Physical
External Links
Snippet
We have developed a stress compensated MEMS magnetic actuators based on Fe 65 Co 35 thin films. The magnetic actuator was designed for˜ 25 kHz mechanical resonance frequency using a finite element method. The cantilever layer stack consists of Si/SiO 2/Fe 65 Co 35 …
- 230000005291 magnetic 0 title abstract description 46
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
- G01R33/18—Measuring magnetostrictive properties
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