Selvakumar et al., 1996 - Google Patents
Low power, wide range threshold acceleration sensing systemSelvakumar et al., 1996
- Document ID
- 1713582656718500293
- Author
- Selvakumar A
- Yazdi N
- Najafi K
- Publication year
- Publication venue
- Proceedings of Ninth International Workshop on Micro Electromechanical Systems
External Links
Snippet
A complete threshold acceleration detection system is presented in this paper, possessing (i) an array of threshold accelerometers, and (ii) a low power interface circuit. The sensors were designed and fabricated using a modified bulk silicon dissolved wafer process. This …
- 230000001133 acceleration 0 title abstract description 22
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Selvakumar et al. | A wide-range micromachined threshold accelerometer array and interface circuit | |
US6058778A (en) | Integrated sensor having plurality of released beams for sensing acceleration | |
US6619123B2 (en) | Micromachined shock sensor | |
Selvakumar et al. | Low power, wide range threshold acceleration sensing system | |
US6360605B1 (en) | Micromechanical device | |
US5611940A (en) | Microsystem with integrated circuit and micromechanical component, and production process | |
CN106648218B (en) | Integrated force sensing element | |
US5618989A (en) | Acceleration sensor and measurement method | |
US6713828B1 (en) | Monolithic fully-integrated vacuum sealed BiCMOS pressure sensor | |
JP5222457B2 (en) | Sensors and sensor modules | |
US8779534B2 (en) | Low-G MEMS acceleration switch | |
JPH06302832A (en) | Acceleration sensor | |
US20040017209A1 (en) | Capacitive dynamic quantity sensor, method for manufacturing capacitive dynamic quantity sensor, and detector including capacitive dynamic quantity sensor | |
US6218209B1 (en) | Integrated released beam sensor for sensing acceleration and associated methods | |
Hierold | Intelligent CMOS sensors | |
JPH10115635A (en) | Semiconductor acceleration sensor | |
US20090283846A1 (en) | Backside controlled mems capacitive sensor and interface and method | |
JP2005227089A (en) | Dynamics quantity sensor apparatus | |
Martha et al. | CMOS-MEMS accelerometer with stepped suspended gate FET array: Design & analysis | |
JP2005114440A (en) | Acceleration sensor of capacitance detection type capable of diagnosing malfunction | |
JPH05107262A (en) | Semiconductor acceleration sensor | |
JP2002039739A (en) | Collision prevention sensor | |
CN102735328A (en) | Signal processing circuit, vibration detection circuit, and electronic device | |
JPH0627134A (en) | Acceleration sensor | |
JPH07176768A (en) | Acceleration sensor |