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Kawai et al., 2006 - Google Patents

Piezoelectric actuator integrated cantilever with tunable spring constant for atom probe

Kawai et al., 2006

Document ID
16982332645387765469
Author
Kawai Y
Ono T
Meyers E
Gerber C
Esashi M
Publication year
Publication venue
19th IEEE International Conference on Micro Electro Mechanical Systems

External Links

Snippet

A scanning probe for time-of-flight scanning force microscopy (TOF-SFM) with Pb (Zr, Ti) O 3 (PZT) thin film actuators is designed and fabricated. This probe is designed to pick up an atom or molecule under SFM mode, and emits them to a TOF mass analyzer using field …
Continue reading at ieeexplore.ieee.org (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders

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