Yong et al., 2008 - Google Patents
Design, analysis and control of a fast nanopositioning stageYong et al., 2008
View PDF- Document ID
- 16848197248771702204
- Author
- Yong Y
- Aphale S
- Moheimani S
- Publication year
- Publication venue
- 2008 IEEE/ASME International Conference on Advanced Intelligent Mechatronics
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Snippet
We present a fast flexure-based, piezoelectric stack-actuated XY nanopositioning stage which is suitable for high-speed, accurate nanoscale positioning applications. The performance of the design are analyzed using finite-element-analysis software. Experiments …
- 238000004458 analytical method 0 title description 6
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