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Wallburg et al., 2022 - Google Patents

A material removal coefficient for diamond wire sawing of silicon

Wallburg et al., 2022

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Document ID
16774060921813655782
Author
Wallburg F
Kuna M
Budnitzki M
Schoenfelder S
Publication year
Publication venue
Wear

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Snippet

Diamond wire sawing (DWS) of silicon wafers has replaced loose abrasive sawing (LAS) within a very short time, mainly due to the enormous cost pressure in the photovoltaic industry. However, the LAS process is still much better investigated and understood from a …
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