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Van den Berg et al., 1978 - Google Patents

A bakable UHV, Precision three-axis goniometer

Van den Berg et al., 1978

Document ID
1665603557197088576
Author
Van den Berg J
Armour D
Publication year
Publication venue
Nuclear Instruments and Methods

External Links

Snippet

As part of a 2–100 keV, ultra-high vacuum ion impact spectrometer system, a robust target goniometer has been developed with the following characteristics: three independent axes of rotation, stepper motor driven with large angular ranges (240°, 360° and 40°) …
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