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Yoo et al., 2011 - Google Patents

A nonpolar a-plane GaN grown on a hemispherical patterned r-plane sapphire substrate

Yoo et al., 2011

Document ID
16571809998675470089
Author
Yoo G
Park H
Lim H
Lee S
Nam O
Moon Y
Lim C
Kong B
Cho H
Publication year
Publication venue
Japanese Journal of Applied Physics

External Links

Snippet

A high-quality a-plane GaN layer with a pit-free, mirror-like surface was grown on a hemispherical patterned r-plane sapphire substrate (PSS) by metal–organic chemical vapor deposition. The use of the r-plane PSS reduced the density of defects such as basal plane …
Continue reading at iopscience.iop.org (other versions)

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    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02538—Group 13/15 materials
    • H01L21/0254—Nitrides
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/0242—Crystalline insulating materials
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    • H01L21/02516—Crystal orientation
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
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    • H01L21/02494—Structure
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    • H01L33/02—Semiconductor devices with at least one potential-jump barrier or surface barrier specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
    • H01L33/26—Materials of the light emitting region
    • H01L33/30—Materials of the light emitting region containing only elements of group III and group V of the periodic system
    • H01L33/32—Materials of the light emitting region containing only elements of group III and group V of the periodic system containing nitrogen
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