[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Salehi-Khojin, 2008 - Google Patents

Vibration analysis of piezoelectric microcantilever sensors

Salehi-Khojin, 2008

View PDF
Document ID
16460588191085746622
Author
Salehi-Khojin A
Publication year

External Links

Snippet

The main objective of this dissertation is to comprehensively analyze vibration characteristics of microcantilever-based sensors with application to ultra small mass detection and low dimensional materials characterization. The first part of this work focuses …
Continue reading at tigerprints.clemson.edu (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/32—AC mode
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0427—Flexural waves, plate waves, e.g. Lamb waves, tuning fork, cantilever
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on micro-sensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G01N11/10—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by moving a body within the material

Similar Documents

Publication Publication Date Title
Amelio et al. Measurements of elastic properties of ultra-thin diamond-like carbon coatings using atomic force acoustic microscopy
Rabe Atomic force acoustic microscopy
García Amplitude modulation atomic force microscopy
Etchart et al. MEMS sensors for density–viscosity sensing in a low-flow microfluidic environment
Vancura et al. Magnetically actuated complementary metal oxide semiconductor resonant cantilever gas sensor systems
Zhu et al. Nanomechanics of multiferroic composite nanofibers via local excitation piezoresponse force microscopy
Yabuno Review of applications of self‐excited oscillations to highly sensitive vibrational sensors
Mahmoodi et al. Piezoelectrically actuated microcantilevers: An experimental nonlinear vibration analysis
González et al. Determination of the static spring constant of electrically-driven quartz tuning forks with two freely oscillating prongs
Huang et al. Piezoelectric-AlN resonators at two-dimensional flexural modes for the density and viscosity decoupled determination of liquids
US20080011046A1 (en) Displacement Method for Determining the Spring Constant of Scanning Probe Microscope Cantileers using MEMS Actuators
Korayem et al. Vibration response of a piezoelectrically actuated microcantilever subjected to tip–sample interaction
Grutzik et al. Accurate spring constant calibration for very stiff atomic force microscopy cantilevers
Le Rouzic et al. Simultaneous measurement of Young's modulus and Poisson's ratio at microscale with two-modes scanning microdeformation microscopy
Arlett et al. BioNEMS: Nanomechanical systems for single-molecule biophysics
Reinstädtler et al. Investigating ultra-thin lubricant layers using resonant friction force microscopy
Salehi-Khojin Vibration analysis of piezoelectric microcantilever sensors
Sikora Quantitative normal force measurements by means of atomic force microscopy towards the accurate and easy spring constant determination
Chahari et al. Modeling of eccentric nanoneedle in trolling‐mode atomic force microscope
Gao et al. Towards quantitative determination of the spring constant of a scanning force microscope cantilever with a microelectromechanical nano-force actuator
JP2008241619A (en) Cantilever, biosensor and probe microscope
US10656175B2 (en) Cantilever for atomic force microscopy
Cao et al. Vibration-induced nanoscale friction modulation on piezoelectric materials
Mohammed et al. CMUT cavity pressure measurement using an atomic force microscope
Rinaldi et al. Tuning the dynamic behaviour of cantilever MEMS based sensors and actuators