Yamamoto, 1997 - Google Patents

Classifications

• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
  • H01J1/02—Main electrodes
  • H01J1/13—Solid thermionic cathodes
  • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
  • H01J1/28—Dispenser-type cathodes, e.g. L-cathode
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
  • H01J1/02—Main electrodes
  • H01J1/13—Solid thermionic cathodes
  • H01J1/14—Solid thermionic cathodes characterised by the material
  • H01J1/142—Solid thermionic cathodes characterised by the material with alkaline-earth metal oxides, or such oxides used in conjunction with reducing agents, as an emissive material
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J9/00—Apparatus or processes specially adapted to the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
  • H01J9/02—Manufacture of electrodes or electrode systems
  • H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
  • H01J9/042—Manufacture, activation of the emissive part
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
  • H01J1/02—Main electrodes
  • H01J1/13—Solid thermionic cathodes
  • H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
  • H01J1/24—Insulating layer or body located between heater and emissive material
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
  • H01J1/02—Main electrodes
  • H01J1/30—Cold cathodes, e.g. field-emissive cathode
  • H01J1/304—Field-emissive cathodes
  • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J2201/00—Electrodes common to discharge tubes
  • H01J2201/30—Cold cathodes
  • H01J2201/304—Field emission cathodes
  • H01J2201/30446—Field emission cathodes characterised by the emitter material
  • H01J2201/30453—Carbon types
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J9/00—Apparatus or processes specially adapted to the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
  • H01J9/02—Manufacture of electrodes or electrode systems
  • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
  • H01J29/94—Selection of substances for gas fillings; Means for obtaining or maintaining the desired pressure within the tube, e.g. by gettering
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J61/00—Gas- or vapour-discharge lamps
  • H01J61/02—Details
  • H01J61/04—Electrodes; Screens; Shields
  • H01J61/06—Main electrodes
  • H01J61/073—Main electrodes for high-pressure discharge lamps
  • H01J61/0735—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode
  • H01J61/0737—Main electrodes for high-pressure discharge lamps characterised by the material of the electrode characterised by the electron emissive material
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J45/00—Discharge tubes functioning as thermionic generators
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J61/00—Gas- or vapour-discharge lamps
  • H01J61/02—Details
  • H01J61/04—Electrodes; Screens; Shields
  • H01J61/06—Main electrodes
  • H01J61/067—Main electrodes for low-pressure discharge lamps
  • H01J61/0675—Main electrodes for low-pressure discharge lamps characterised by the material of the electrode
  • H01J61/0677—Main electrodes for low-pressure discharge lamps characterised by the material of the electrode characterised by the electron emissive material
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/02—Details
  • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
  • H01J37/06—Electron sources; Electron guns
  • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J31/00—Cathode ray tubes; Electron beam tubes
  • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
  • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
• • H—ELECTRICITY
  • H01—BASIC ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H01L39/00—Devices using superconductivity; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof
  • H01L39/24—Processes or apparatus peculiar to the manufacture or treatment of devices provided for in H01L39/00 or of parts thereof

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