Vishwakarma et al., 2013 - Google Patents
Evaluation of mode dependent fluid damping in a high frequency drumhead microresonatorVishwakarma et al., 2013
View PDF- Document ID
- 15720500508131861471
- Author
- Vishwakarma S
- Pandey A
- Parpia J
- Southworth D
- Craighead H
- Pratap R
- Publication year
- Publication venue
- Journal of Microelectromechanical Systems
External Links
Snippet
Design of high quality factor (Q) micromechanical resonators depends critically on our understanding of energy losses in their oscillations. The Q of such structures depends on process induced prestress in the structural geometry, interaction with the external …
- 239000012530 fluid 0 title abstract description 62
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING; COUNTING
- G06F—ELECTRICAL DIGITAL DATA PROCESSING
- G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
- G06F17/50—Computer-aided design
- G06F17/5009—Computer-aided design using simulation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/02827—Elastic parameters, strength or force
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Vishwakarma et al. | Evaluation of mode dependent fluid damping in a high frequency drumhead microresonator | |
| Rodriguez et al. | Direct detection of Akhiezer damping in a silicon MEMS resonator | |
| Guo et al. | A finite element analysis of thermoelastic damping in vented MEMS beam resonators | |
| Amabili et al. | Chaotic vibrations of circular cylindrical shells: Galerkin versus reduced-order models via the proper orthogonal decomposition method | |
| Pratap et al. | Squeeze film effects in MEMS devices | |
| Awrejcewicz et al. | Thermoelastic vibrations of a Timoshenko microbeam based on the modified couple stress theory | |
| Caruntu et al. | Reduced order model analysis of frequency response of alternating current near half natural frequency electrostatically actuated MEMS cantilevers | |
| Ruzziconi et al. | An efficient reduced-order model to investigate the behavior of an imperfect microbeam under axial load and electric excitation | |
| Caruntu et al. | Voltage response of primary resonance of electrostatically actuated MEMS clamped circular plate resonators | |
| Liu et al. | Multi-objective design optimization of electrostatically actuated microbeam resonators with and without parameter uncertainty | |
| Pandey et al. | A comparative study of analytical squeeze film damping models in rigid rectangular perforated MEMS structures with experimental results | |
| Weckman et al. | Reducing dissipation in piezoelectric flexural microplate resonators in liquid environments | |
| Madinei et al. | Stability and bifurcation analysis of an asymmetrically electrostatically actuated microbeam | |
| Maity et al. | An improved analytical and finite element method model of nanoelectromechanical system based micromachined ultrasonic transducers | |
| Nguyen et al. | Influences of temperature on the quality factors of micro-beam resonators in gas rarefaction | |
| Ghanbari et al. | Studying thin film damping in a micro-beam resonator based on non-classical theories | |
| Hao et al. | Vibration displacement on substrate due to time-harmonic stress sources from a micromechanical resonator | |
| Ghanbari et al. | Estimating the effective quality factor of a rotary comb-drive microresonator based on a non-classical theory | |
| Chen et al. | Evaluation of support loss in micro-beam resonators: A revisit | |
| Kravetc et al. | Approximation of potential function in the problem of forced escape | |
| Qiu et al. | Hydrodynamic analysis of piezoelectric microcantilevers vibrating in viscous compressible gases | |
| Novak et al. | Dynamic behaviour of a planar micro-beam loaded by a fluid-gap: analytical and numerical approach in a high frequency range, benchmark solutions | |
| Hosaka et al. | Coupled vibration of microcantilever array induced by airflow force | |
| Qiu et al. | Hydrodynamic loading on vibrating piezoelectric microresonators | |
| Harne | On the linear elastic, isotropic modeling of poroelastic distributed vibration absorbers at low frequencies |