Bengtsson et al., 1992 - Google Patents
The bonded unipolar silicon‐silicon junctionBengtsson et al., 1992
- Document ID
- 15681719872925414573
- Author
- Bengtsson S
- Andersson G
- Andersson M
- Engström O
- Publication year
- Publication venue
- Journal of applied physics
External Links
Snippet
The electrical and optical properties of wafer bonded unipolar silicon‐silicon junctions were investigated. The interfaces, both n‐n type and p‐p type, were prepared using wafers with hydrophilic surfaces. The current versus voltage characteristics, the current transients …
- SBEQWOXEGHQIMW-UHFFFAOYSA-N [Si].[Si] data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='300px' height='300px' viewBox='0 0 300 300'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='300.0' height='300.0' x='0.0' y='0.0'> </rect>
<text x='60.3' y='170.0' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='87.9' y='170.0' class='atom-0' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >i</text>
<text x='196.7' y='170.0' class='atom-1' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='224.3' y='170.0' class='atom-1' style='font-size:40px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >i</text>
<path d='M 101.2,138.0 L 101.2,137.8 L 101.2,137.7 L 101.1,137.5 L 101.1,137.3 L 101.0,137.2 L 100.9,137.0 L 100.8,136.9 L 100.7,136.7 L 100.6,136.6 L 100.5,136.5 L 100.4,136.4 L 100.2,136.3 L 100.1,136.2 L 99.9,136.1 L 99.7,136.1 L 99.6,136.0 L 99.4,136.0 L 99.2,136.0 L 99.1,136.0 L 98.9,136.0 L 98.7,136.1 L 98.6,136.1 L 98.4,136.2 L 98.2,136.2 L 98.1,136.3 L 98.0,136.4 L 97.8,136.5 L 97.7,136.7 L 97.6,136.8 L 97.5,136.9 L 97.4,137.1 L 97.3,137.2 L 97.3,137.4 L 97.2,137.6 L 97.2,137.7 L 97.2,137.9 L 97.2,138.1 L 97.2,138.3 L 97.2,138.4 L 97.3,138.6 L 97.3,138.8 L 97.4,138.9 L 97.5,139.1 L 97.6,139.2 L 97.7,139.3 L 97.8,139.5 L 98.0,139.6 L 98.1,139.7 L 98.2,139.8 L 98.4,139.8 L 98.6,139.9 L 98.7,139.9 L 98.9,140.0 L 99.1,140.0 L 99.2,140.0 L 99.4,140.0 L 99.6,140.0 L 99.7,139.9 L 99.9,139.9 L 100.1,139.8 L 100.2,139.7 L 100.4,139.6 L 100.5,139.5 L 100.6,139.4 L 100.7,139.3 L 100.8,139.1 L 100.9,139.0 L 101.0,138.8 L 101.1,138.7 L 101.1,138.5 L 101.2,138.3 L 101.2,138.2 L 101.2,138.0 L 99.2,138.0 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 101.2,162.0 L 101.2,161.8 L 101.2,161.7 L 101.1,161.5 L 101.1,161.3 L 101.0,161.2 L 100.9,161.0 L 100.8,160.9 L 100.7,160.7 L 100.6,160.6 L 100.5,160.5 L 100.4,160.4 L 100.2,160.3 L 100.1,160.2 L 99.9,160.1 L 99.7,160.1 L 99.6,160.0 L 99.4,160.0 L 99.2,160.0 L 99.1,160.0 L 98.9,160.0 L 98.7,160.1 L 98.6,160.1 L 98.4,160.2 L 98.2,160.2 L 98.1,160.3 L 98.0,160.4 L 97.8,160.5 L 97.7,160.7 L 97.6,160.8 L 97.5,160.9 L 97.4,161.1 L 97.3,161.2 L 97.3,161.4 L 97.2,161.6 L 97.2,161.7 L 97.2,161.9 L 97.2,162.1 L 97.2,162.3 L 97.2,162.4 L 97.3,162.6 L 97.3,162.8 L 97.4,162.9 L 97.5,163.1 L 97.6,163.2 L 97.7,163.3 L 97.8,163.5 L 98.0,163.6 L 98.1,163.7 L 98.2,163.8 L 98.4,163.8 L 98.6,163.9 L 98.7,163.9 L 98.9,164.0 L 99.1,164.0 L 99.2,164.0 L 99.4,164.0 L 99.6,164.0 L 99.7,163.9 L 99.9,163.9 L 100.1,163.8 L 100.2,163.7 L 100.4,163.6 L 100.5,163.5 L 100.6,163.4 L 100.7,163.3 L 100.8,163.1 L 100.9,163.0 L 101.0,162.8 L 101.1,162.7 L 101.1,162.5 L 101.2,162.3 L 101.2,162.2 L 101.2,162.0 L 99.2,162.0 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 101.2,146.0 L 101.2,145.8 L 101.2,145.7 L 101.1,145.5 L 101.1,145.3 L 101.0,145.2 L 100.9,145.0 L 100.8,144.9 L 100.7,144.7 L 100.6,144.6 L 100.5,144.5 L 100.4,144.4 L 100.2,144.3 L 100.1,144.2 L 99.9,144.1 L 99.7,144.1 L 99.6,144.0 L 99.4,144.0 L 99.2,144.0 L 99.1,144.0 L 98.9,144.0 L 98.7,144.1 L 98.6,144.1 L 98.4,144.2 L 98.2,144.2 L 98.1,144.3 L 98.0,144.4 L 97.8,144.5 L 97.7,144.7 L 97.6,144.8 L 97.5,144.9 L 97.4,145.1 L 97.3,145.2 L 97.3,145.4 L 97.2,145.6 L 97.2,145.7 L 97.2,145.9 L 97.2,146.1 L 97.2,146.3 L 97.2,146.4 L 97.3,146.6 L 97.3,146.8 L 97.4,146.9 L 97.5,147.1 L 97.6,147.2 L 97.7,147.3 L 97.8,147.5 L 98.0,147.6 L 98.1,147.7 L 98.2,147.8 L 98.4,147.8 L 98.6,147.9 L 98.7,147.9 L 98.9,148.0 L 99.1,148.0 L 99.2,148.0 L 99.4,148.0 L 99.6,148.0 L 99.7,147.9 L 99.9,147.9 L 100.1,147.8 L 100.2,147.7 L 100.4,147.6 L 100.5,147.5 L 100.6,147.4 L 100.7,147.3 L 100.8,147.1 L 100.9,147.0 L 101.0,146.8 L 101.1,146.7 L 101.1,146.5 L 101.2,146.3 L 101.2,146.2 L 101.2,146.0 L 99.2,146.0 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 101.2,154.0 L 101.2,153.8 L 101.2,153.7 L 101.1,153.5 L 101.1,153.3 L 101.0,153.2 L 100.9,153.0 L 100.8,152.9 L 100.7,152.7 L 100.6,152.6 L 100.5,152.5 L 100.4,152.4 L 100.2,152.3 L 100.1,152.2 L 99.9,152.1 L 99.7,152.1 L 99.6,152.0 L 99.4,152.0 L 99.2,152.0 L 99.1,152.0 L 98.9,152.0 L 98.7,152.1 L 98.6,152.1 L 98.4,152.2 L 98.2,152.2 L 98.1,152.3 L 98.0,152.4 L 97.8,152.5 L 97.7,152.7 L 97.6,152.8 L 97.5,152.9 L 97.4,153.1 L 97.3,153.2 L 97.3,153.4 L 97.2,153.6 L 97.2,153.7 L 97.2,153.9 L 97.2,154.1 L 97.2,154.3 L 97.2,154.4 L 97.3,154.6 L 97.3,154.8 L 97.4,154.9 L 97.5,155.1 L 97.6,155.2 L 97.7,155.3 L 97.8,155.5 L 98.0,155.6 L 98.1,155.7 L 98.2,155.8 L 98.4,155.8 L 98.6,155.9 L 98.7,155.9 L 98.9,156.0 L 99.1,156.0 L 99.2,156.0 L 99.4,156.0 L 99.6,156.0 L 99.7,155.9 L 99.9,155.9 L 100.1,155.8 L 100.2,155.7 L 100.4,155.6 L 100.5,155.5 L 100.6,155.4 L 100.7,155.3 L 100.8,155.1 L 100.9,155.0 L 101.0,154.8 L 101.1,154.7 L 101.1,154.5 L 101.2,154.3 L 101.2,154.2 L 101.2,154.0 L 99.2,154.0 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 237.6,138.0 L 237.5,137.8 L 237.5,137.7 L 237.5,137.5 L 237.4,137.3 L 237.4,137.2 L 237.3,137.0 L 237.2,136.9 L 237.1,136.7 L 237.0,136.6 L 236.9,136.5 L 236.7,136.4 L 236.6,136.3 L 236.4,136.2 L 236.3,136.1 L 236.1,136.1 L 235.9,136.0 L 235.8,136.0 L 235.6,136.0 L 235.4,136.0 L 235.3,136.0 L 235.1,136.1 L 234.9,136.1 L 234.8,136.2 L 234.6,136.2 L 234.5,136.3 L 234.3,136.4 L 234.2,136.5 L 234.1,136.7 L 234.0,136.8 L 233.9,136.9 L 233.8,137.1 L 233.7,137.2 L 233.6,137.4 L 233.6,137.6 L 233.6,137.7 L 233.6,137.9 L 233.6,138.1 L 233.6,138.3 L 233.6,138.4 L 233.6,138.6 L 233.7,138.8 L 233.8,138.9 L 233.9,139.1 L 234.0,139.2 L 234.1,139.3 L 234.2,139.5 L 234.3,139.6 L 234.5,139.7 L 234.6,139.8 L 234.8,139.8 L 234.9,139.9 L 235.1,139.9 L 235.3,140.0 L 235.4,140.0 L 235.6,140.0 L 235.8,140.0 L 235.9,140.0 L 236.1,139.9 L 236.3,139.9 L 236.4,139.8 L 236.6,139.7 L 236.7,139.6 L 236.9,139.5 L 237.0,139.4 L 237.1,139.3 L 237.2,139.1 L 237.3,139.0 L 237.4,138.8 L 237.4,138.7 L 237.5,138.5 L 237.5,138.3 L 237.5,138.2 L 237.6,138.0 L 235.6,138.0 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 237.6,162.0 L 237.5,161.8 L 237.5,161.7 L 237.5,161.5 L 237.4,161.3 L 237.4,161.2 L 237.3,161.0 L 237.2,160.9 L 237.1,160.7 L 237.0,160.6 L 236.9,160.5 L 236.7,160.4 L 236.6,160.3 L 236.4,160.2 L 236.3,160.1 L 236.1,160.1 L 235.9,160.0 L 235.8,160.0 L 235.6,160.0 L 235.4,160.0 L 235.3,160.0 L 235.1,160.1 L 234.9,160.1 L 234.8,160.2 L 234.6,160.2 L 234.5,160.3 L 234.3,160.4 L 234.2,160.5 L 234.1,160.7 L 234.0,160.8 L 233.9,160.9 L 233.8,161.1 L 233.7,161.2 L 233.6,161.4 L 233.6,161.6 L 233.6,161.7 L 233.6,161.9 L 233.6,162.1 L 233.6,162.3 L 233.6,162.4 L 233.6,162.6 L 233.7,162.8 L 233.8,162.9 L 233.9,163.1 L 234.0,163.2 L 234.1,163.3 L 234.2,163.5 L 234.3,163.6 L 234.5,163.7 L 234.6,163.8 L 234.8,163.8 L 234.9,163.9 L 235.1,163.9 L 235.3,164.0 L 235.4,164.0 L 235.6,164.0 L 235.8,164.0 L 235.9,164.0 L 236.1,163.9 L 236.3,163.9 L 236.4,163.8 L 236.6,163.7 L 236.7,163.6 L 236.9,163.5 L 237.0,163.4 L 237.1,163.3 L 237.2,163.1 L 237.3,163.0 L 237.4,162.8 L 237.4,162.7 L 237.5,162.5 L 237.5,162.3 L 237.5,162.2 L 237.6,162.0 L 235.6,162.0 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 237.6,146.0 L 237.5,145.8 L 237.5,145.7 L 237.5,145.5 L 237.4,145.3 L 237.4,145.2 L 237.3,145.0 L 237.2,144.9 L 237.1,144.7 L 237.0,144.6 L 236.9,144.5 L 236.7,144.4 L 236.6,144.3 L 236.4,144.2 L 236.3,144.1 L 236.1,144.1 L 235.9,144.0 L 235.8,144.0 L 235.6,144.0 L 235.4,144.0 L 235.3,144.0 L 235.1,144.1 L 234.9,144.1 L 234.8,144.2 L 234.6,144.2 L 234.5,144.3 L 234.3,144.4 L 234.2,144.5 L 234.1,144.7 L 234.0,144.8 L 233.9,144.9 L 233.8,145.1 L 233.7,145.2 L 233.6,145.4 L 233.6,145.6 L 233.6,145.7 L 233.6,145.9 L 233.6,146.1 L 233.6,146.3 L 233.6,146.4 L 233.6,146.6 L 233.7,146.8 L 233.8,146.9 L 233.9,147.1 L 234.0,147.2 L 234.1,147.3 L 234.2,147.5 L 234.3,147.6 L 234.5,147.7 L 234.6,147.8 L 234.8,147.8 L 234.9,147.9 L 235.1,147.9 L 235.3,148.0 L 235.4,148.0 L 235.6,148.0 L 235.8,148.0 L 235.9,148.0 L 236.1,147.9 L 236.3,147.9 L 236.4,147.8 L 236.6,147.7 L 236.7,147.6 L 236.9,147.5 L 237.0,147.4 L 237.1,147.3 L 237.2,147.1 L 237.3,147.0 L 237.4,146.8 L 237.4,146.7 L 237.5,146.5 L 237.5,146.3 L 237.5,146.2 L 237.6,146.0 L 235.6,146.0 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 237.6,154.0 L 237.5,153.8 L 237.5,153.7 L 237.5,153.5 L 237.4,153.3 L 237.4,153.2 L 237.3,153.0 L 237.2,152.9 L 237.1,152.7 L 237.0,152.6 L 236.9,152.5 L 236.7,152.4 L 236.6,152.3 L 236.4,152.2 L 236.3,152.1 L 236.1,152.1 L 235.9,152.0 L 235.8,152.0 L 235.6,152.0 L 235.4,152.0 L 235.3,152.0 L 235.1,152.1 L 234.9,152.1 L 234.8,152.2 L 234.6,152.2 L 234.5,152.3 L 234.3,152.4 L 234.2,152.5 L 234.1,152.7 L 234.0,152.8 L 233.9,152.9 L 233.8,153.1 L 233.7,153.2 L 233.6,153.4 L 233.6,153.6 L 233.6,153.7 L 233.6,153.9 L 233.6,154.1 L 233.6,154.3 L 233.6,154.4 L 233.6,154.6 L 233.7,154.8 L 233.8,154.9 L 233.9,155.1 L 234.0,155.2 L 234.1,155.3 L 234.2,155.5 L 234.3,155.6 L 234.5,155.7 L 234.6,155.8 L 234.8,155.8 L 234.9,155.9 L 235.1,155.9 L 235.3,156.0 L 235.4,156.0 L 235.6,156.0 L 235.8,156.0 L 235.9,156.0 L 236.1,155.9 L 236.3,155.9 L 236.4,155.8 L 236.6,155.7 L 236.7,155.6 L 236.9,155.5 L 237.0,155.4 L 237.1,155.3 L 237.2,155.1 L 237.3,155.0 L 237.4,154.8 L 237.4,154.7 L 237.5,154.5 L 237.5,154.3 L 237.5,154.2 L 237.6,154.0 L 235.6,154.0 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 data:image/svg+xml;base64,<?xml version='1.0' encoding='iso-8859-1'?>
<svg version='1.1' baseProfile='full'
              xmlns='http://www.w3.org/2000/svg'
                      xmlns:rdkit='http://www.rdkit.org/xml'
                      xmlns:xlink='http://www.w3.org/1999/xlink'
                  xml:space='preserve'
width='85px' height='85px' viewBox='0 0 85 85'>
<!-- END OF HEADER -->
<rect style='opacity:1.0;fill:#FFFFFF;stroke:none' width='85.0' height='85.0' x='0.0' y='0.0'> </rect>
<text x='10.2' y='53.6' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='26.2' y='53.6' class='atom-0' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >i</text>
<text x='48.8' y='53.6' class='atom-1' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >S</text>
<text x='64.8' y='53.6' class='atom-1' style='font-size:23px;font-style:normal;font-weight:normal;fill-opacity:1;stroke:none;font-family:sans-serif;text-anchor:start;fill:#3B4143' >i</text>
<path d='M 35.5,35.0 L 35.5,34.9 L 35.4,34.8 L 35.4,34.7 L 35.4,34.7 L 35.4,34.6 L 35.3,34.5 L 35.3,34.4 L 35.2,34.3 L 35.1,34.2 L 35.1,34.2 L 35.0,34.1 L 34.9,34.1 L 34.8,34.0 L 34.7,34.0 L 34.6,33.9 L 34.5,33.9 L 34.4,33.9 L 34.3,33.9 L 34.2,33.9 L 34.1,33.9 L 34.0,33.9 L 33.9,33.9 L 33.8,34.0 L 33.7,34.0 L 33.7,34.1 L 33.6,34.1 L 33.5,34.2 L 33.4,34.3 L 33.4,34.3 L 33.3,34.4 L 33.3,34.5 L 33.2,34.6 L 33.2,34.7 L 33.2,34.8 L 33.1,34.9 L 33.1,35.0 L 33.1,35.1 L 33.1,35.2 L 33.2,35.3 L 33.2,35.4 L 33.2,35.5 L 33.3,35.6 L 33.3,35.7 L 33.4,35.7 L 33.4,35.8 L 33.5,35.9 L 33.6,36.0 L 33.7,36.0 L 33.7,36.1 L 33.8,36.1 L 33.9,36.1 L 34.0,36.2 L 34.1,36.2 L 34.2,36.2 L 34.3,36.2 L 34.4,36.2 L 34.5,36.2 L 34.6,36.2 L 34.7,36.1 L 34.8,36.1 L 34.9,36.0 L 35.0,36.0 L 35.1,35.9 L 35.1,35.9 L 35.2,35.8 L 35.3,35.7 L 35.3,35.6 L 35.4,35.5 L 35.4,35.4 L 35.4,35.3 L 35.4,35.2 L 35.5,35.1 L 35.5,35.0 L 34.3,35.0 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 35.5,49.0 L 35.5,48.9 L 35.4,48.8 L 35.4,48.7 L 35.4,48.6 L 35.4,48.5 L 35.3,48.4 L 35.3,48.3 L 35.2,48.2 L 35.1,48.1 L 35.1,48.1 L 35.0,48.0 L 34.9,48.0 L 34.8,47.9 L 34.7,47.9 L 34.6,47.8 L 34.5,47.8 L 34.4,47.8 L 34.3,47.8 L 34.2,47.8 L 34.1,47.8 L 34.0,47.8 L 33.9,47.9 L 33.8,47.9 L 33.7,47.9 L 33.7,48.0 L 33.6,48.0 L 33.5,48.1 L 33.4,48.2 L 33.4,48.3 L 33.3,48.3 L 33.3,48.4 L 33.2,48.5 L 33.2,48.6 L 33.2,48.7 L 33.1,48.8 L 33.1,48.9 L 33.1,49.0 L 33.1,49.1 L 33.2,49.2 L 33.2,49.3 L 33.2,49.4 L 33.3,49.5 L 33.3,49.6 L 33.4,49.7 L 33.4,49.7 L 33.5,49.8 L 33.6,49.9 L 33.7,49.9 L 33.7,50.0 L 33.8,50.0 L 33.9,50.1 L 34.0,50.1 L 34.1,50.1 L 34.2,50.1 L 34.3,50.1 L 34.4,50.1 L 34.5,50.1 L 34.6,50.1 L 34.7,50.0 L 34.8,50.0 L 34.9,49.9 L 35.0,49.9 L 35.1,49.8 L 35.1,49.8 L 35.2,49.7 L 35.3,49.6 L 35.3,49.5 L 35.4,49.4 L 35.4,49.3 L 35.4,49.3 L 35.4,49.2 L 35.5,49.1 L 35.5,49.0 L 34.3,49.0 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 35.5,39.7 L 35.5,39.6 L 35.4,39.5 L 35.4,39.4 L 35.4,39.3 L 35.4,39.2 L 35.3,39.1 L 35.3,39.0 L 35.2,38.9 L 35.1,38.9 L 35.1,38.8 L 35.0,38.7 L 34.9,38.7 L 34.8,38.6 L 34.7,38.6 L 34.6,38.6 L 34.5,38.5 L 34.4,38.5 L 34.3,38.5 L 34.2,38.5 L 34.1,38.5 L 34.0,38.6 L 33.9,38.6 L 33.8,38.6 L 33.7,38.7 L 33.7,38.7 L 33.6,38.8 L 33.5,38.8 L 33.4,38.9 L 33.4,39.0 L 33.3,39.1 L 33.3,39.2 L 33.2,39.2 L 33.2,39.3 L 33.2,39.4 L 33.1,39.5 L 33.1,39.6 L 33.1,39.7 L 33.1,39.8 L 33.2,39.9 L 33.2,40.0 L 33.2,40.1 L 33.3,40.2 L 33.3,40.3 L 33.4,40.4 L 33.4,40.5 L 33.5,40.5 L 33.6,40.6 L 33.7,40.7 L 33.7,40.7 L 33.8,40.7 L 33.9,40.8 L 34.0,40.8 L 34.1,40.8 L 34.2,40.8 L 34.3,40.8 L 34.4,40.8 L 34.5,40.8 L 34.6,40.8 L 34.7,40.8 L 34.8,40.7 L 34.9,40.7 L 35.0,40.6 L 35.1,40.6 L 35.1,40.5 L 35.2,40.4 L 35.3,40.3 L 35.3,40.3 L 35.4,40.2 L 35.4,40.1 L 35.4,40.0 L 35.4,39.9 L 35.5,39.8 L 35.5,39.7 L 34.3,39.7 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 35.5,44.3 L 35.5,44.2 L 35.4,44.1 L 35.4,44.0 L 35.4,43.9 L 35.4,43.8 L 35.3,43.7 L 35.3,43.7 L 35.2,43.6 L 35.1,43.5 L 35.1,43.4 L 35.0,43.4 L 34.9,43.3 L 34.8,43.3 L 34.7,43.2 L 34.6,43.2 L 34.5,43.2 L 34.4,43.2 L 34.3,43.2 L 34.2,43.2 L 34.1,43.2 L 34.0,43.2 L 33.9,43.2 L 33.8,43.3 L 33.7,43.3 L 33.7,43.3 L 33.6,43.4 L 33.5,43.5 L 33.4,43.5 L 33.4,43.6 L 33.3,43.7 L 33.3,43.8 L 33.2,43.9 L 33.2,44.0 L 33.2,44.1 L 33.1,44.2 L 33.1,44.3 L 33.1,44.4 L 33.1,44.5 L 33.2,44.6 L 33.2,44.7 L 33.2,44.8 L 33.3,44.8 L 33.3,44.9 L 33.4,45.0 L 33.4,45.1 L 33.5,45.2 L 33.6,45.2 L 33.7,45.3 L 33.7,45.3 L 33.8,45.4 L 33.9,45.4 L 34.0,45.4 L 34.1,45.5 L 34.2,45.5 L 34.3,45.5 L 34.4,45.5 L 34.5,45.5 L 34.6,45.4 L 34.7,45.4 L 34.8,45.4 L 34.9,45.3 L 35.0,45.3 L 35.1,45.2 L 35.1,45.1 L 35.2,45.1 L 35.3,45.0 L 35.3,44.9 L 35.4,44.8 L 35.4,44.7 L 35.4,44.6 L 35.4,44.5 L 35.5,44.4 L 35.5,44.3 L 34.3,44.3 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 74.1,35.0 L 74.1,34.9 L 74.1,34.8 L 74.1,34.7 L 74.0,34.7 L 74.0,34.6 L 73.9,34.5 L 73.9,34.4 L 73.8,34.3 L 73.8,34.2 L 73.7,34.2 L 73.6,34.1 L 73.5,34.1 L 73.4,34.0 L 73.3,34.0 L 73.3,33.9 L 73.2,33.9 L 73.1,33.9 L 73.0,33.9 L 72.9,33.9 L 72.8,33.9 L 72.7,33.9 L 72.6,33.9 L 72.5,34.0 L 72.4,34.0 L 72.3,34.1 L 72.2,34.1 L 72.1,34.2 L 72.1,34.3 L 72.0,34.3 L 72.0,34.4 L 71.9,34.5 L 71.9,34.6 L 71.8,34.7 L 71.8,34.8 L 71.8,34.9 L 71.8,35.0 L 71.8,35.1 L 71.8,35.2 L 71.8,35.3 L 71.8,35.4 L 71.9,35.5 L 71.9,35.6 L 72.0,35.7 L 72.0,35.7 L 72.1,35.8 L 72.1,35.9 L 72.2,36.0 L 72.3,36.0 L 72.4,36.1 L 72.5,36.1 L 72.6,36.1 L 72.7,36.2 L 72.8,36.2 L 72.9,36.2 L 73.0,36.2 L 73.1,36.2 L 73.2,36.2 L 73.3,36.2 L 73.3,36.1 L 73.4,36.1 L 73.5,36.0 L 73.6,36.0 L 73.7,35.9 L 73.8,35.9 L 73.8,35.8 L 73.9,35.7 L 73.9,35.6 L 74.0,35.5 L 74.0,35.4 L 74.1,35.3 L 74.1,35.2 L 74.1,35.1 L 74.1,35.0 L 72.9,35.0 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 74.1,49.0 L 74.1,48.9 L 74.1,48.8 L 74.1,48.7 L 74.0,48.6 L 74.0,48.5 L 73.9,48.4 L 73.9,48.3 L 73.8,48.2 L 73.8,48.1 L 73.7,48.1 L 73.6,48.0 L 73.5,48.0 L 73.4,47.9 L 73.3,47.9 L 73.3,47.8 L 73.2,47.8 L 73.1,47.8 L 73.0,47.8 L 72.9,47.8 L 72.8,47.8 L 72.7,47.8 L 72.6,47.9 L 72.5,47.9 L 72.4,47.9 L 72.3,48.0 L 72.2,48.0 L 72.1,48.1 L 72.1,48.2 L 72.0,48.3 L 72.0,48.3 L 71.9,48.4 L 71.9,48.5 L 71.8,48.6 L 71.8,48.7 L 71.8,48.8 L 71.8,48.9 L 71.8,49.0 L 71.8,49.1 L 71.8,49.2 L 71.8,49.3 L 71.9,49.4 L 71.9,49.5 L 72.0,49.6 L 72.0,49.7 L 72.1,49.7 L 72.1,49.8 L 72.2,49.9 L 72.3,49.9 L 72.4,50.0 L 72.5,50.0 L 72.6,50.1 L 72.7,50.1 L 72.8,50.1 L 72.9,50.1 L 73.0,50.1 L 73.1,50.1 L 73.2,50.1 L 73.3,50.1 L 73.3,50.0 L 73.4,50.0 L 73.5,49.9 L 73.6,49.9 L 73.7,49.8 L 73.8,49.8 L 73.8,49.7 L 73.9,49.6 L 73.9,49.5 L 74.0,49.4 L 74.0,49.3 L 74.1,49.3 L 74.1,49.2 L 74.1,49.1 L 74.1,49.0 L 72.9,49.0 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 74.1,39.7 L 74.1,39.6 L 74.1,39.5 L 74.1,39.4 L 74.0,39.3 L 74.0,39.2 L 73.9,39.1 L 73.9,39.0 L 73.8,38.9 L 73.8,38.9 L 73.7,38.8 L 73.6,38.7 L 73.5,38.7 L 73.4,38.6 L 73.3,38.6 L 73.3,38.6 L 73.2,38.5 L 73.1,38.5 L 73.0,38.5 L 72.9,38.5 L 72.8,38.5 L 72.7,38.6 L 72.6,38.6 L 72.5,38.6 L 72.4,38.7 L 72.3,38.7 L 72.2,38.8 L 72.1,38.8 L 72.1,38.9 L 72.0,39.0 L 72.0,39.1 L 71.9,39.2 L 71.9,39.2 L 71.8,39.3 L 71.8,39.4 L 71.8,39.5 L 71.8,39.6 L 71.8,39.7 L 71.8,39.8 L 71.8,39.9 L 71.8,40.0 L 71.9,40.1 L 71.9,40.2 L 72.0,40.3 L 72.0,40.4 L 72.1,40.5 L 72.1,40.5 L 72.2,40.6 L 72.3,40.7 L 72.4,40.7 L 72.5,40.7 L 72.6,40.8 L 72.7,40.8 L 72.8,40.8 L 72.9,40.8 L 73.0,40.8 L 73.1,40.8 L 73.2,40.8 L 73.3,40.8 L 73.3,40.8 L 73.4,40.7 L 73.5,40.7 L 73.6,40.6 L 73.7,40.6 L 73.8,40.5 L 73.8,40.4 L 73.9,40.3 L 73.9,40.3 L 74.0,40.2 L 74.0,40.1 L 74.1,40.0 L 74.1,39.9 L 74.1,39.8 L 74.1,39.7 L 72.9,39.7 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
<path d='M 74.1,44.3 L 74.1,44.2 L 74.1,44.1 L 74.1,44.0 L 74.0,43.9 L 74.0,43.8 L 73.9,43.7 L 73.9,43.7 L 73.8,43.6 L 73.8,43.5 L 73.7,43.4 L 73.6,43.4 L 73.5,43.3 L 73.4,43.3 L 73.3,43.2 L 73.3,43.2 L 73.2,43.2 L 73.1,43.2 L 73.0,43.2 L 72.9,43.2 L 72.8,43.2 L 72.7,43.2 L 72.6,43.2 L 72.5,43.3 L 72.4,43.3 L 72.3,43.3 L 72.2,43.4 L 72.1,43.5 L 72.1,43.5 L 72.0,43.6 L 72.0,43.7 L 71.9,43.8 L 71.9,43.9 L 71.8,44.0 L 71.8,44.1 L 71.8,44.2 L 71.8,44.3 L 71.8,44.4 L 71.8,44.5 L 71.8,44.6 L 71.8,44.7 L 71.9,44.8 L 71.9,44.8 L 72.0,44.9 L 72.0,45.0 L 72.1,45.1 L 72.1,45.2 L 72.2,45.2 L 72.3,45.3 L 72.4,45.3 L 72.5,45.4 L 72.6,45.4 L 72.7,45.4 L 72.8,45.5 L 72.9,45.5 L 73.0,45.5 L 73.1,45.5 L 73.2,45.5 L 73.3,45.4 L 73.3,45.4 L 73.4,45.4 L 73.5,45.3 L 73.6,45.3 L 73.7,45.2 L 73.8,45.1 L 73.8,45.1 L 73.9,45.0 L 73.9,44.9 L 74.0,44.8 L 74.0,44.7 L 74.1,44.6 L 74.1,44.5 L 74.1,44.4 L 74.1,44.3 L 72.9,44.3 Z' style='fill:#000000;fill-rule:evenodd;fill-opacity:1;stroke:#000000;stroke-width:0.0px;stroke-linecap:butt;stroke-linejoin:miter;stroke-opacity:1;' />
</svg>
 [Si].[Si] 0 title abstract description 31
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/115—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by at least one potential-jump barrier or surface barrier, e.g. phototransistors
- H01L31/101—Devices sensitive to infra-red, visible or ultra-violet radiation
- H01L31/102—Devices sensitive to infra-red, visible or ultra-violet radiation characterised by only one potential barrier or surface barrier
- H01L31/105—Devices sensitive to infra-red, visible or ultra-violet radiation characterised by only one potential barrier or surface barrier the potential barrier being of the PIN type
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
- H01L21/0405—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer the devices having semiconductor bodies comprising semiconducting carbon, e.g. diamond, diamond-like carbon
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L31/00—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infra-red radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus peculiar to the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Bengtsson et al. | The bonded unipolar silicon‐silicon junction | |
Siffert et al. | Polarization in cadmium telluride nuclear radiation detectors | |
McGarrity et al. | Silicon carbide JFET radiation response | |
Lang et al. | A study of deep levels in GaAs by capacitance spectroscopy | |
Milnes | Semiconductor devices and integrated electronics | |
Schroder | Surface voltage and surface photovoltage: history, theory and applications | |
Adamchuk et al. | Internal photoemission spectroscopy of semiconductor-insulator interfaces | |
Tasch Jr et al. | Recombination-generation and optical properties of gold acceptor in silicon | |
Mitchell et al. | Surface effects of radiation on semiconductor devices | |
Arafat et al. | Optical and other measurement techniques of carrier lifetime in semiconductors | |
Schmidt et al. | Recombination activity of iron-gallium and iron-indium pairs in silicon | |
Watanabe et al. | DLTS study of RIE-induced deep levels in Si using P+ N diode arrays | |
Lemaire et al. | Open‐circuit voltage decay: moving to a flexible method of characterisation | |
Green et al. | Frequency response of the current multiplication process in MIS tunnel diodes | |
Mirsagatov et al. | Mechanism of current transport in Schottky barrier diodes based on coarse-grained CdTe films | |
Karazhanov | Mechanism for the anomalous degradation of silicon space solar cells | |
Taylor et al. | Investigation of carrier removal in electron irradiated silicon diodes | |
Lee et al. | Measurement time reduction for generation lifetimes | |
Engström et al. | Electrical characterization of bonding interfaces | |
Marchetaux et al. | Interface states under LOCOS bird's beak region | |
van Opdorp | Si-Ge isotype heterojunctions | |
Eichinger | Characterization and analysis of detector materials and processes | |
Johnson | Deep level transient spectroscopy: Defect characterization in semiconductor devices | |
Lourenco et al. | The analysis of the temperature dependence of photoconductive frequency‐resolved spectroscopy in the presence of carrier trapping: Application to polycrystalline silicon | |
Yamashita et al. | A new switching effect in semi-insulating GaAs and its use for deep level spectroscopy |