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Ohnishi et al., 1983 - Google Patents

Preparation and properties of amorphous silicon produced by a consecutive, separated reaction chamber method

Ohnishi et al., 1983

Document ID
15359754499770177076
Author
Ohnishi M
Nishiwaki H
Enomoto K
Nakashima Y
Tsuda S
Takahama T
Tarui H
Tanaka M
Dojo H
Kuwano Y
Publication year
Publication venue
Journal of Non-Crystalline Solids

External Links

Snippet

A new fabrication apparatus was developed from the consecutive, separated reaction chamber method in order to fabricate the multi-gap amorphous solar cell. In this fabrication process, the different amorphous materials are deposited in different reaction chambers. It …
Continue reading at www.sciencedirect.com (other versions)

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