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Pan et al., 2011 - Google Patents

Al/Al2O3/Sm2O3/SiO2/Si structure memory for nonvolatile memory application

Pan et al., 2011

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Document ID
15256318036036822304
Author
Pan T
Chen F
Publication year
Publication venue
Semiconductor science and technology

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Snippet

In this paper, we propose an Al/Al 2 O 3/Sm 2 O 3/SiO 2/Si structure memory using a high-k Sm 2 O 3 film and Al 2 O 3 film as a charge-trapping layer and blocking layer for nonvolatile memory application, respectively. The Al/Al 2 O 3/Sm 2 O 3/SiO 2/Si structure memories …
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