[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Walker et al., 2004 - Google Patents

New results from the Precessions polishing process scaled to larger sizes

Walker et al., 2004

View PDF
Document ID
15190613041249246278
Author
Walker D
Beaucamp A
Brooks D
Doubrovski V
Cassie M
Dunn C
Freeman R
King A
Libert M
McCavana G
Morton R
Riley D
Simms J
Publication year
Publication venue
Optical Fabrication, Metrology, and Material Advancements for Telescopes

External Links

Snippet

The Precessions process uses an inflated membrane-tool that delivers near-Gaussian polishing spots. The tool-motion over the part can be constructed to preserve an aspheric form whilst removing damage from preceding processes, or control the form through a tool …
Continue reading at www.academia.edu (PDF) (other versions)

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical means
    • G01B11/24—Measuring arrangements characterised by the use of optical means for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical means
    • G01B11/02—Measuring arrangements characterised by the use of optical means for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical means for measuring length, width or thickness for measuring thickness, e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing of optical properties of lenses
    • G01M11/0242—Testing of optical properties of lenses by measuring geometrical properties or aberrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical means
    • G01B11/30—Measuring arrangements characterised by the use of optical means for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Exposure apparatus for microlithography

Similar Documents

Publication Publication Date Title
Walker et al. New results from the Precessions polishing process scaled to larger sizes
US8271120B2 (en) Method and system for processing optical elements using magnetorheological finishing
JP5668944B2 (en) Method and system for processing optical elements using magnetic viscoelastic fluid finishing
Häusler et al. Deflectometry vs. interferometry
US20140071263A1 (en) Method and device for non-contact measuring surfaces
Scheiding et al. Freeform mirror fabrication and metrology using a high performance test CGH and advanced alignment features
Tricard et al. Subaperture approaches for asphere polishing and metrology
Yu et al. Research on fabrication of mirror segments for E-ELT
Deng et al. Review on mid-spatial frequency error suppression in optical components manufacturing
Walker et al. Recent developments of Precessions polishing for larger components and free-form surfaces
Supranowitz et al. Fabrication and metrology of high-precision freeform surfaces
Walker et al. Precessions aspheric polishing: new results from the development program
CN103615989A (en) Online testing apparatus for polishing plastic disc of large-scale ring polishing machine
Supranowitz et al. Improving surface figure and microroughness of IR materials and diamond turned surfaces with magnetorheological finishing (MRF)
Messner et al. Manufacturing meter-scale aspheric optics
Walker et al. Edge-control and surface-smoothness in sub-aperture polishing of mirror segments
Walker et al. New developments in the precessions process for manufacturing free-form, large-optical, and precision-mechanical surfaces
Walker et al. Commissioning of the first Precessions 1.2 m CNC polishing machines for large optics
Tinker et al. Aspheric Finishing of Glass and SiC Optics
Kuo et al. Fabrication of ф160 mm convex hyperbolic mirror for remote sensing instrument
Walker et al. Technologies for producing segments for extremely large telescopes
Kuo et al. Freeform mirror polishing for compensation on non-symmetry system aberrations of remote sensing instrument
Gubbels et al. Flexible manufacturing of large aspheres for VLT's Optical Tube Assemblies
Ghosh et al. Subaperture polishing of silicon asphere
Blalock et al. Metrology of Freeform Optics