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Atak et al., 2018 - Google Patents

LiNbO3 thin films for all-solid-state electrochromic devices

Atak et al., 2018

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Document ID
15183119182262132553
Author
Atak G
CoĹźkun Ă
Publication year
Publication venue
Optical Materials

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Snippet

Lithium niobate (LiNbO 3) thin films were non-reactively deposited onto glass and ITO coated glass substrates by RF magnetron sputtering using a LiNbO 3 target in an argon (Ar) atmosphere at room temperature. The deposition power was 75 W during the deposition …
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