Chen et al., 2009 - Google Patents
Fabrication of large-area nickel nanobump arraysChen et al., 2009
View PDF- Document ID
- 15150820309320196994
- Author
- Chen X
- Wei X
- Jiang K
- Publication year
- Publication venue
- Microelectronic engineering
External Links
Snippet
Nanostructures have found wide applications in biochemical sensors and optical devices. Therefore, fabrication techniques are required to be suitable for preparing large-area nanopatterns at high throughput and low cost. This paper presents such an approach for …
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANO-TECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
- B82Y40/00—Manufacture or treatment of nano-structures
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