Musavigharavi et al., 2021 - Google Patents
Nanoscale structural and chemical properties of ferroelectric aluminum scandium nitride thin filmsMusavigharavi et al., 2021
- Document ID
- 14463430968607486088
- Author
- Musavigharavi P
- Meng A
- Wang D
- Zheng J
- Foucher A
- Olsson III R
- Stach E
- Publication year
- Publication venue
- The Journal of Physical Chemistry C
External Links
Snippet
The local atomic structure and nanoscale chemistry of ferroelectric aluminum scandium nitride thin films (Al1–x Sc x N) are examined using advanced transmission electron microscopy (TEM) techniques. An Al1–x Sc x N (x= 0.36) film of∼ 20 nm thickness was …
- 239000010409 thin film 0 title abstract description 93
Classifications
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L41/00—Piezo-electric devices in general; Electrostrictive devices in general; Magnetostrictive devices in general; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L41/22—Processes or apparatus specially adapted for the assembly, manufacture or treatment of piezo-electric or electrostrictive devices or of parts thereof
- H01L41/31—Applying piezo-electric or electrostrictive parts or bodies onto an electrical element or another base
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