Hirabayashi et al., 1988 - Google Patents
Selective deposition of diamond crystals by chemical vapor deposition using a tungsten-filament methodHirabayashi et al., 1988
- Document ID
- 1420357399257613298
- Author
- Hirabayashi K
- Taniguchi Y
- Takamatsu O
- Ikeda T
- Ikoma K
- Publication year
- Publication venue
- Applied physics letters
External Links
Snippet
Selective deposition of polycrystalline and single-crystal diamonds has been achieved on a silicon wafer by chemical vapor deposition from CH 4 and H 2 gases using a hot-filament method. The nucleation of diamonds occurs selectively at the sites fabricated by successive …
- 239000010432 diamond 0 title abstract description 33
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