Fujii et al., 2013 - Google Patents
Focused ion beam induced surface damage effect on the mechanical properties of silicon nanowiresFujii et al., 2013
- Document ID
- 14192216826875776488
- Author
- Fujii T
- Namazu T
- Sudoh K
- Sakakihara S
- Inoue S
- Publication year
- Publication venue
- Journal of engineering materials and technology
External Links
Snippet
In this paper, the effect of surface damage induced by focused ion beam (FIB) fabrication on the mechanical properties of silicon (Si) nanowires (NWs) was investigated. Uniaxial tensile testing of the NWs was performed using a reusable on-chip tensile test device with 1000 …
- 239000002070 nanowire 0 title abstract description 96
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q60/00—Particular type of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
- G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
- G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
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