[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Lamartine et al., 1983 - Google Patents

Application of low damage SIMS/AES/XPS of the Ba-OW system to cathode characterization

Lamartine et al., 1983

Document ID
13905286892414250071
Author
Lamartine B
Czarnecki J
Haas T
Publication year
Publication venue
Applications of Surface Science

External Links

Snippet

The activation of an impregnated dispenser cathode was characterized by SIMS, AES, and XPS on the basis of analogous results from prepared thin film model standards of the Ba-OW system. Proper SIMS characterization required low damage conditions (500 eV Ar+, 5 nA/cm …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/421—Mass filters, i.e. deviating unwanted ions without trapping
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0468—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0409—Sample holders or containers
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H01J49/0045—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn characterised by the fragmentation or other specific reaction
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/02—Details
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted to the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps

Similar Documents

Publication Publication Date Title
Stevie Secondary ion mass spectrometry: applications for depth profiling and surface characterization
US7304299B2 (en) Super alloy ionization chamber for reactive samples
Winger et al. Hybrid BEEQ tandem mass spectrometer for the study of ion/surface collision processes
GB2239985A (en) Method and apparatus for surface analysis
Menzel et al. Infrared matrix‐assisted laser desorption/ionization mass spectrometry with a transversely excited atmospheric pressure carbon dioxide laser at 10.6 µm wavelength with static and delayed ion extraction
US6608318B1 (en) Ionization chamber for reactive samples
Lamartine et al. Application of low damage SIMS/AES/XPS of the Ba-OW system to cathode characterization
Mason et al. Glow discharge mass spectrometry of some organic compounds
US4670651A (en) Apparatus for performing the SNMS method
Stuewer Glow discharge mass spectrometry—A versatile tool for elemental analysis
Melnychuk et al. Reflection of hydrogen atoms from alkali and alkaline earth oxide surfaces
McPhail et al. Profile distortions during secondary ion mass spectrometry analyses of resistive layers due to electron stimulated desorption and charging
US20150221492A1 (en) Radio-frequency ionization of chemicals
Ross et al. Fast-atom molecular secondary-ion mass spectrometry
Küttel et al. Mass and energy selected ion beam for deposition and ion induced surface modifications
Callahan et al. High-pressure fast-atom bombardment mass spectrometry: Collisional stabilization and reactions of alkali halide cluster ions
Ross et al. Liquid metal substrate for dynamic secondary ion mass spectrometry
Müller Elemental analysis of surfaces and thin films
KR20220083792A (en) Mass Spectrometers and Mass Spectrometer Calibration Methods
White et al. Surface composition by analysis of neutral and ion impact radiation
Oechsner Electron Gas SNMS
Leisch Surface analysis of dielectric films by time-of-flight—secondary ion mass spectrometry
Van Roy et al. Assessment of local analysis by Fourier transform laser microprobe mass spectrometry with external ion source
JP2023540125A (en) Mass spectrometer calibration and tuning methods
Panda Secondary Ion Mass Spectroscopy