Futami et al., 1990 - Google Patents
Nanometer positioning and its micro-dynamicsFutami et al., 1990
- Document ID
- 13958831707276125473
- Author
- Futami S
- Furutani A
- Yoshida S
- Publication year
- Publication venue
- Nanotechnology
External Links
Snippet
A one-axis mechanism, driven by an AC linear motor and guided by a rolling ball guide, has been constructed. The micro-dynamics of the rolling guide shows that the group of balls of the guide behaves as a rigid spring within a displacement of about 100 nm, and normal …
- 238000006073 displacement reaction 0 abstract description 35
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