[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Vasile et al., 1973 - Google Patents

Mass-spectrometric ion sampling from reactive plasmas I. Apparatus for argon and reactive discharges

Vasile et al., 1973

Document ID
1365055561428197398
Author
Vasile M
Smolinsky G
Publication year
Publication venue
International Journal of Mass Spectrometry and Ion Physics

External Links

Snippet

An apparatus has been constructed to sample the ionic and neutral species that emerge from rf discharges in which chemical reactions are taking place. The results for pure argon show that the sheath potential (∼ 50 V) between the sampling orifice and the plasma is too …
Continue reading at www.sciencedirect.com (other versions)

Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
    • H01J49/0468—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components with means for heating or cooling the sample
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometer or separator tubes
    • H01J49/004—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn
    • H01J49/0045—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn characterised by the fragmentation or other specific reaction
    • H01J49/0059—Combinations of spectrometers, tandem spectrometers, e.g. MS/MS, MSn characterised by the fragmentation or other specific reaction by a photon beam, photo-dissociation
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes, e.g. for surface treatment of objects such as coating, plating, etching, sterilising or bringing about chemical reactions
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes

Similar Documents

Publication Publication Date Title
McLuckey et al. Atmospheric sampling glow discharge ionization source for the determination of trace organic compounds in ambient air
Turner et al. Abundance of excited ions in O+ and O2+ ion beams
Vasile et al. Mass-spectrometric ion sampling from reactive plasmas I. Apparatus for argon and reactive discharges
Wysocki et al. Surface-induced dissociation in tandem quadrupole mass spectrometers: a comparison of three designs
Kofel et al. A high Pressure external ion source for fourier transform ion cyclotron resonance spectrometry
Laude et al. A suspended trapping pulse sequence for simplified mass calibration in Fourier-transform mass spectrometry
Steiner et al. Consideration of a millisecond pulsed glow discharge time-of-flight mass spectrometer for concurrent elemental and molecular analysis
Schubert et al. A simple, inexpensive SIMS apparatus
Chen et al. Direct charge number and molecular weight determination of large individual ions by electrospray ionization Fourier transform ion cyclotron resonance mass spectrometry
Jackson et al. Mass spectrometric investigation of active nitrogen
Coburn Mass spectrometric studies of positive ions in rf glow discharges
US4159423A (en) Chemical ionization ion source
Carazzato et al. Characterization of a glow discharge ion source for the mass spectrometric analysis of organic compounds
Mason et al. Glow discharge mass spectrometry of some organic compounds
Franks FAB: the fast atomic beam source
RU2145082C1 (en) Method determining elements in solutions and device for its realization
Kelner et al. Energy distribution of secondary organic ions
Alexander et al. Characterization of a saddle-field discharge gun for FABMS using different discharge vapours
US3860848A (en) High pressure ion source for ion optical analytical equipment and for particle accelerators
Eyler et al. Gas-phase phenylium and acyclic [C6H5]+ isomers
Méndez et al. On the ionic chemistry in DC cold plasmas of H 2 with Ar
Melton High transmission and dual electron beam ion sources for mass spectrometry
Watson et al. Continuous‐flow fast‐atom bombardment on an external‐ion‐source Fourier transform ion cyclotron resonance mass spectrometer
Ferreiro et al. Mass spectrometric and ion energy diagnostics in the study of plasma etching and polymerization
Whitlock et al. Negative oxygen ions from a glow discharge source