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Prinz et al., 2001 - Google Patents

A new technique for fabricating three-dimensional micro-and nanostructures of various shapes

Prinz et al., 2001

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Document ID
13428946032525835783
Author
Prinz V
Grützmacher D
Beyer A
David C
Ketterer B
Deckardt E
Publication year
Publication venue
Nanotechnology

External Links

Snippet

In this paper we show that complex three-dimensional micro-and nanostructure shells can be formed by directional rolling up of thin strained Si/SiGe heterostructures. By lifting strain- designed Si/SiGe films using a sacrificial layer from the substrate and by a proper patterning …
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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANO-TECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
    • B82Y40/00—Manufacture or treatment of nano-structures
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANO-TECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
    • B82Y10/00—Nano-technology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANO-TECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; MEASUREMENT OR ANALYSIS OF NANO-STRUCTURES; MANUFACTURE OR TREATMENT OF NANO-STRUCTURES
    • B82Y30/00—Nano-technology for materials or surface science, e.g. nano-composites

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