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Feldmann et al., 2020 - Google Patents

Industrial TOPCon solar cells realized by a PECVD tube process

Feldmann et al., 2020

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Document ID
13413788385015691219
Author
Feldmann F
Steinhauser B
Pernau T
Nagel H
Fellmeth T
Mack S
Ourinson D
Lohmüller E
Polzin J
Moldovan A
Bivour M
Clement F
Rentsch J
Hermle M
Glunz S
Publication year
Publication venue
Presented at the 37th European PV Solar Energy Conference and Exhibition

External Links

Snippet

These days low-pressure chemical vapor deposition (LPCVD) is commonly used by the photovoltaic industry to deposit Si layers for tunnel oxide passivated contact (TOPCon). This work summarizes the development of an alternative TOPCon deposition process using a …
Continue reading at www.ise.fraunhofer.de (PDF) (other versions)

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