[go: up one dir, main page]
More Web Proxy on the site http://driver.im/

Sandner et al., 2010 - Google Patents

Synchronized microscanner array for large aperture receiver optics of LIDAR systems

Sandner et al., 2010

Document ID
134055521486882652
Author
Sandner T
Grasshoff T
Wildenhain M
Schenk H
Publication year
Publication venue
MOEMS and Miniaturized Systems IX

External Links

Snippet

Traditional laser scanners for 3D distance measurement involve expensive, heavy,(potentially) slow rotating mirrors for light deflection of the scanning TOF (time of flight) distance measurement, not suitable for compact, robust and highly portable LIDAR system …
Continue reading at www.spiedigitallibrary.org (other versions)

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/08—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/001—Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B6/00—Light guides
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/3578—Piezoelectric force

Similar Documents

Publication Publication Date Title
Toshiyoshi et al. Linearization of electrostatically actuated surface micromachined 2-D optical scanner
Jung et al. Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications
US7079299B1 (en) Staggered torsional electrostatic combdrive and method of forming same
Ji et al. Electromagnetic two-dimensional scanner using radial magnetic field
JP2008542849A (en) MEMS device, tilted micromirror, light control method, and mirror formation method
Kurth et al. Silicon mirrors and micromirror arrays for spatial laser beam modulation
US8213066B2 (en) Electrostatic comb-drive micromechanical actuator
Hao et al. A design methodology for a bulk-micromachined two-dimensional electrostatic torsion micromirror
Lammel et al. Optical microscanners and microspectrometers using thermal bimorph actuators
Jeong et al. A novel microfabrication of a self-aligned vertical comb drive on a single SOI wafer for optical MEMS applications
Sandner et al. Synchronized microscanner array for large aperture receiver optics of LIDAR systems
Sandner et al. Microscanner with vertical out of plane combdrive
Zhou et al. Scanning micromirrors fabricated by an SOI/SOI wafer-bonding process
Sandner et al. Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera
Dotzel et al. Silicon mirrors and micromirror arrays for spatial laser beam modulation
Milanovic et al. High aspect ratio micromirrors with large static rotation and piston actuation
CN101614871A (en) Large-area piezo-actuated micromirror with integrated angle sensor
Sandner et al. Out-of-plane translatory MEMS actuator with extraordinary large stroke for optical path length modulation
Grahmann et al. Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer
Chiou et al. A micromirror with large static rotation and vertical actuation
Lawrence et al. Laser Doppler vibrometry for optical MEMS
Iseki et al. Shrinking design of a MEMS optical scanner having four torsion beams and arms
Ji et al. Dual-axis electromagnetic scanning micromirror using radial magnetic field
Sadat et al. Large-deflection spiral-shaped micromirror actuator
Ahmad et al. MEMS Micromirror Actuation Techniques: A Comprehensive Review of Trends, Innovations, and Future Prospects