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Shan et al., 2008 - Google Patents

Microstructure formation on low temperature co-fired ceramic green substrates using micro embossing

Shan et al., 2008

Document ID
13490548755769243905
Author
Shan X
Maw H
Tjeung R
Ling S
Lu C
Jachowicz R
Publication year
Publication venue
Microsystem technologies

External Links

Snippet

Microstructures were formed on low temperature co-fired ceramic (LTCC) green substrates with high fidelity using micro embossing. The impact of embossing temperature and pattern density against the embossed profiles was investigated. The increase in pattern density …
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