Shan et al., 2008 - Google Patents
Microstructure formation on low temperature co-fired ceramic green substrates using micro embossingShan et al., 2008
- Document ID
- 13490548755769243905
- Author
- Shan X
- Maw H
- Tjeung R
- Ling S
- Lu C
- Jachowicz R
- Publication year
- Publication venue
- Microsystem technologies
External Links
Snippet
Microstructures were formed on low temperature co-fired ceramic (LTCC) green substrates with high fidelity using micro embossing. The impact of embossing temperature and pattern density against the embossed profiles was investigated. The increase in pattern density …
- 238000004049 embossing 0 title abstract description 38
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